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OCIS: 220.4610, 160.4670, 160.4760

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Obtaining high-purity chemical materials for chemical, plasmachemical, and pyrolytic deposition of thin oxide films

V. V. Potelov

This paper discusses questions of the purification of silicone compounds and alcoholates by rectification, crystallization, and adsorption for obtaining thin oxide layers as well as multilayer structures for various functional purposes.