DOI: 10.17586/1023-5086-2023-90-04-78-91
УДК 535.21
Алена Сергеевна Шишкина1*, Язан Алсаиф2, Вероника Андреевна Якимук3, Чуньюй Ли4, Ольга Владимировна Андреева5, Роман Алексеевич Заколдаев6
Университет ИТМО, Санкт-Петербург, Россия
1shishka2001.shishkina@yandex.ru https://orcid.org/0000-0002-6628-1234
2yazan.alsaif97@hotmail.com https://orcid.org/0000-0003-0160-0828
3yakimuk2001@mail.ru https://orcid.org/0000-0002-1810-847X
4ccharmylee@gmail.com https://orcid.org/0000-0002-1401-0918
5olga_andreeva@mail.ru https://orcid.org/0000-0003-3245-0762
6zakoldaev@gmail.com https://orcid.org/0000-0001-6212-0532
Аннотация
Предмет исследования. Исследование влияния щелочного травления на три типа модификации нанопористой силикатной матрицы: двулучепреломляющие структуры, уплотнение и разуплотнение материала, сформированные ультракороткими лазерными импульсами в объёме материала. Цель работы. Проводится исследование влияния щелочного травления на оптические и морфологические свойства трёх типов лазерно-индуцированной модификации нанопористой силикатной матрицы: двулучепреломляющие структуры, уплотнение и разуплотнение материала, сформированные ультракороткими лазерными импульсами. Методология. Технология реализуется за три этапа: (i) прямая лазерная запись в пластине нанопористой силикатной матрицы с применением остросфокусированных (20Х, NA = 0,4) фемтосекундных лазерных импульсов (n = 25–50 кГц, u = 1, 5, 45 мм/с, Р = 15–60 мВт, t = 500 и 2000 фс, l = 515 нм); (ii) щелочное травление в гидроксиде калия, которое способствует очищению сформированных треков. Кроме того, на этом этапе происходит увеличение среднего размера пор до 17 нм; (iii) очистка образца в дистиллированной воде с последующей сушкой в печи. Основные результаты. Определены условия формирования полых микроканалов с длиной 5 мм и шириной 5–7 мкм, микроканалов с уплотнённой оболочкой вокруг, а также микроканалов с селективным отражением в узком видимом спектральном диапазоне. Каналы также были заполнены жидкостью с объёмом 3 мкл, где спустя 10–12 с произошло полное испарение жидкости из канала. Практическая значимость. Продемонстрированы ключевые этапы гибридной лазерной субтрактивной технологии создания микрофлюидных и оптофлюидных элементов внутри нанопористой силикатной матрицы. Проведённое исследование открывает новые возможности при разработке объёмных микрофлюидных систем, что востребовано для исследования биохимических реакций или диагностики изменений окружающей среды. В перспективе созданные оптофлюидные элементы могут быть востребованы при создании диагностических устройств – лабораторий на чипе (lab on a chip).
Ключевые слова: микроканалы, пористое стекло, нанопористая матрица, фемтосекундные лазерные импульсы, субтрактивная технология
Благодарность: исследование выполнено за счёт гранта Российского научного фонда (проект № 20-71-10103). Исследование по вводу лазерного излучения в оптофлюидный микроканал было выполнено в рамках финансовой поддержки гранта НИРМА ФТ МФ Университета ИТМО «Канальные оптические микроволноводы в нанопористых оптических материалах для задач диагностики окружающей среды» Якимук Вероники.
Ссылка для цитирования: Шишкина А.С., Язан Алсаиф, Якимук В.А., Ли Чуньюй, Андреева О.В., Заколдаев Р.А. Гибридная лазерная субтрактивная технология формирования оптофлюидных элементов в нанопористой силикатной матрице // Оптический журнал. 2023. Т. 90. № 4. С. 78–91. http://doi.org/10.17586/1023-5086-2023-90-04-78-91
Коды OCIS: 140.3390, 160.2750.
Hybrid laser subtractive technology for the fabrication optofluidic elements in a nanoporous silicate matrix
Alena Shishkina1*, Yazan AlSaif2, Veronika Yakimuk3, Chunyu Li4, Olga Andreeva5, Roman Zakoldaev6
ITMO University, Saint-Petersburg, Russia
1shishka2001.shishkina@yandex.ru https://orcid.org/0000-0002-6628-1234
2yazan.alsaif97@hotmail.com https://orcid.org/0000-0003-0160-0828
3yakimuk2001@mail.ru https://orcid.org/0000-0002-1810-847X
4ccharmylee@gmail.com https://orcid.org/0000-0002-1401-0918
5olga_andreeva@mail.ru https://orcid.org/0000-0003-3245-0762
6zakoldaev@gmail.com https://orcid.org/0000-0001-6212-0532
Abstract
Subject of study. Investigation of the effect of alkaline etching on three types of laser-induced modification initiated inside of nanoporous silicate matrix: birefringent structures, densification and decompaction of the material. The purpose. The influence of alkaline etching on the optical and morphological properties of three types of laser-induced modification of porous glass is being studied: birefringent structures, densification and decompaction of the material formed by ultrashort laser pulses. Methodology. The technology is implemented in three stages: (i) direct laser writing in the nanoporous silicate matrix using focused (20X, NA = 0.4) femtosecond laser pulses (n = 25–50 kHz, u = 1–45 mm/s, P = 15–60 mW, t = 500 and 2000 fs, l = 515 nm); (ii) alkaline etching in potassium hydroxide, which helps to clean up the fabricated tracks, in addition, at this stage, the average pore size increases to 17 nm; (iii) purification of the sample in distilled water followed by drying in a furnace. Main results. The conditions for fabrication of hollow microchannels with a length of 5 mm and a width of 5–7 µm. The microchannels were also filled with liquid (volume of 3 µl), where after 10–12 s the liquid completely evaporated. The microchannels possess a selective reflection in a narrow visible spectral range. Practical significance. A novel methodology of microchannel fabrication in nanoporous silicate matrix plates is demonstrated. The channel is surrounded by waveguiding layers that expand possible applications in optofluidics. The study opens up new possibilities in the development of volumetric microfluidic systems, which is in demand for the study of biochemical reactions or the diagnosis of environmental changes. In the future, such optofluidic elements in nanoporous silicate matrix can be in demand for novel chip-scale sensor devices or laboratories on a chip (lab on a chip).
Keywords: microchannels, porous glass, nanoporous matrix, femtosecond laser pulses, subtractive technology
Acknowledgment: the study was supported by a grant from the Russian Science Foundation (Project № 20-71-10103). The study on the input of laser radiation into an optofluidic microchannel was carried out as part of the financial support of the NIRMA FT MF grant of ITMO University “Channel optical waveguides in nanoporous optical materials for environmental diagnostics” by Yakimuk Veronika.
For citation: Shishkina А.S., Yazan AlSaif, Yakimuk V.А., Li Chunyu, Andreeva O.V., Zakoldaev R.А. Hybrid laser subtractive technology for the fabrication of optofluidic elements in a nanoporous silicate matrix [ In Russian] // Opticheskii Zhurnal. 2023. V. 90. № 4. P. 78–91. http://doi.org/10.17586/1023-5086-2023-90-04-78-91
OCIS сodes: 140.3390, 160.2750.
Список источников
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2. Li W., Chu W., Yin D., Liang Y., Wang P., Qi J., Wang Z., Lin J., Wang M., Wang Z., Cheng Y. A three-dimensional microfluidic mixer of a homogeneous mixing efficiency fabricated by ultrafast laser internal processing of glass // Applied Physics A. 2020. V. 126. № 10. P. 1–7. https://doi.org/10.1007/s00339-020-04000-8
3. Niculescu A.G., Chircov C., Bîrcă A.C., Grumezescu A.M. Fabrication and applications of microfluidic devices: A review // International Journal of Molecular Sciences. 2021. V. 22. № 4. P. 2011. https://doi.org/10.3390/ijms22042011
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16. Sima F., Sugioka K., Vázquez R.M., Osellame R., Kelemen L., Ormos P. Three-dimensional femtosecond laser processing for lab-on-a-chip applications // Nanophotonics. 2018. V. 7. № 3. P. 613–634. https://doi.org/10.1515/nanoph-2017-0097
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18. Zhong L., Zakoldaev R.A., Sergeev M.M., Veiko V.P., Li Z. Porous glass density tailoring by femtosecond laser pulses // Optical and Quantum Electronics. 2020. V. 52. № 1. P. 1–8. https://doi.org/10.1007/s11082-019-2163-7
19. Kudryashov S., Rupasov A., Zakoldaev R., Smaev M., Kuchmizhak A., Zolot’ko A., Kosobokov M., Akhmatkhanov A., Shur V. Nanohydrodynamic local compaction and nanoplasmonic form-birefringence inscription by ultrashort laser pulses in nanoporous fused Silica // Nanomaterials. 2022. V. 12. № 20. P. 3613. https://doi.org/10.3390/nano12203613
20. Itina T.E., Zakoldaev R.A., Sergeev M.M., Ma H., Kudryashov S.I., Medvedev O.S., Veiko V.P. Ultra-short laser-induced high aspect ratio densification in porous glass // Optical Materials Express. 2019. V. 9. № 11. P. 4379–4389. https://doi.org/10.1364/OME.9.004379
21. Быков Е.П., Заколдаев Р.А., Андреева Н.В., Шишкина А.С., Яндыбаева Ю.И., Андреева О.В. Изготовление нанопористых силикатных матриц: вопросы оптической однородности // Оптический журнал. 2022. Т. 89. № 3. С. 56–67. https://doi.org/10.17586/1023-5086-2022-89-03-56-67
22. Ma H., Zakoldaev R.A., Rudenko A., Sergeev M.M., Veiko V.P., Itina T.E. Well-controlled femtosecond laser inscription of periodic void structures in porous glass for photonic applications // Optics Express. 2017. V. 25. № 26. P. 33261–33270. https://doi.org/10.1364/OE.25.033261
23. Liao Y., Ni J., Qiao L., Huang M., Bellouard Y., Sugioka K., Cheng Y. High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation // Optica. 2015. V. 2. № 4. P. 329-34. https://doi.org/10.1364/OPTICA.2.000329
24. Kudryashov S.I., Danilov P.A., Rupasov A.E., Smayev M.P., Kirichenko A.N., Smirnov N.A., Ionin A.A., Zolot'ko A.S., Zakoldaev R.A. Birefringent microstructures in bulk fluorite produced by ultrafast pulsewidth-dependent laser inscription // Applied Surface Science. 2021. V. 568. P. 150877. https://doi.org/10.1016/j.apsusc.2021.150877
25. Liu Z., Xu J., Lin Z., Qi J., Li X., Zhang A., Lin J., Chen J., Fang Z., Song Y., Chu W. Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication // Optics & Laser Technology. 2021. V. 141. P. 107118. https://doi.org/10.1016/j.optlastec.2021.107118
26. Xu J., Sima F., Sugioka K. Femtosecond laser direct writing for 3D microfluidic biochip fabrication // Laser Micro-Nano-Manufacturing and 3D Microprinting. 2020. P. 247–272. https://doi.org/10.1007/978-3-030-59313-1_8
References
1. Bruus H. Theoretical microfluidics. Chippenham: Oxford university press, 2007. 345 p.
2. Li W., Chu W., Yin D., Liang Y., Wang P., Qi J., Wang Z., Lin J., Wang M., Wang Z., Cheng Y. A three-dimensional microfluidic mixer of a homogeneous mixing efficiency fabricated by ultrafast laser internal processing of glass // Applied Physics A. 2020. V. 126. № 10. P. 1–7. https://doi.org/10.1007/s00339-020-04000-8
3. Niculescu A.G., Chircov C., Bîrcă A.C., Grumezescu A.M. Fabrication and applications of microfluidic devices: A review // International Journal of Molecular Sciences. 2021. V. 22. № 4. P. 2011. https://doi.org/10.3390/ijms22042011
4. Italia V., Giakoumaki A.N., Bonfadini S., Bharadwaj V., Le Phu T., Eaton S.M., Ramponi R., Bergamini G., Lanzani G., Criante L. Laserinscribed glass microfluidic device for nonmixing flow of miscible solvents // Micromachines. 2018. V. 10. № 1. P. 23. https://doi.org/10.3390/mi10010023
5. Liao Y., Song J., Li E., Luo Y., Shen Y., Chen D., Cheng Y., Xu Z., Sugioka K., Midorikawa K. Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing // Lab on a Chip. 2012. V. 12. № 4. P. 746–749. http://doi.org/. 10.1039/C2LC21015K
6. Tan D., Zhang B., Qiu J. Ultrafast laser direct writing in glass: Thermal accumulation engineering and applications // Laser & Photonics Reviews. 2021. V. 15. № 9. P. 2000455. https://doi.org/10.1002/lpor.202000455
7. Fedotov S., Lipatiev A., Lipateva T., Lotarev S., Sigaev V. Hollow channel formation inside Sodium Aluminoborate Glass by femtosecond laser writing and distilled water etching // Materials. 2021. V. 14. № 19. P. 5495. https://doi.org/10.3390/ma14195495
8. Sima F., Sugioka K. Ultrafast laser manufacturing of nanofluidic systems // Nanophotonics. 2021. V. 10. № 9. P. 2389–2406. https://doi.org/10.1515/nanoph-2021-0159
9. Macias-Montero M., Muñoz F., Sotillo B., Del Hoyo J., Ariza R., Fernandez P., Siegel J., Solis J. Femtosecond laser induced thermophoretic writing of waveguides in silicate glass // Scientific reports. 2021. V. 1. № 1. P. 1–12. https://doi.org/10.1038/s41598-021-87765-z
10. Shakhgildyan G., Lipatiev A., Lotarev S., Fedotov S., Sigaev V. Glass: Home of the periodic table // Frontiers in Chemistry. 2020. V. 8. P. 384. https://doi.org/10.3389/fchem.2020.00384
11. Kanehira S., Si J., Qiu J., Fujita K., Hirao K. Periodic nanovoid structures via femtosecond laser irradiation // Nano Letters. 2005. V. 5. № 8. P. 1591–1595. https://doi.org/10.1021/nl0510154
12. Li X., Xu J., Lin Z., Qi J., Wang P., Chu W., Fang Z., Wang Z., Chai Z., Cheng Y. Polarization-insensitive space-selective etching in fused silica induced by picosecond laser irradiation // Applied Surface Science. 2019. V. 485. P. 188–193. https://doi.org/10.1016/j.apsusc.2019.04.211
13. Capuano L., Tiggelaar R.M., Berenschot J.W., Gardeniers J.G., Römer G.R. Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching // Optics and Lasers in Engineering. 2020. V. 133. P. 106114. https://doi.org/10.1016/j.optlaseng.2020.
14. Vazquez R.M., Osellame R., Nolli D., Dongre C., van den Vlekkert H., Ramponi R., Pollnau M., Cerullo G. Integration of femtosecond laser written optical waveguides in a lab-on-chip // Lab on a Chip. 2009. V. № 1. P. 91–96. https://doi.org/10.1039/B808360F
15. Lijing Z., Zakoldaev R.A., Sergeev M.M., Petrov A.B., Veiko V.P., Alodjants A.P. Optical sensitivity of waveguides inscribed in nanoporous silicate framework // Nanomaterials. 2021. V. 11. № 1. P. 123. https://doi.org/10.3390/nano11010123
16. Sima F., Sugioka K., Vázquez R.M., Osellame R., Kelemen L., Ormos P. Three-dimensional femtosecond laser processing for lab-on-a-chip applications // Nanophotonics. 2018. V. 7. № 3. P. 613–634. https://doi.org/10.1515/nanoph-2017-0097
17. Liu C., Liao Y., He F., Song J., Lin D., Cheng Y., Sugioka K., Midorikawa K. Compact 3D microfluidic channel structures embedded in glass fabricated by femtosecond laser direct writing //Journal of Laser Micro Nanoengineering. 2013. V. 8. № 2. P. 170. http://doi.org/10.2961/jlmn.2013.02.0010
18. Zhong L., Zakoldaev R.A., Sergeev M.M., Veiko V.P., Li Z. Porous glass density tailoring by femtosecond laser pulses // Optical and Quantum Electronics. 2020. V. 52. № 1. P. 1–8. https://doi.org/10.1007/s11082-019-2163-7
19. Kudryashov S., Rupasov A., Zakoldaev R., Smaev M., Kuchmizhak A., Zolot’ko A., Kosobokov M., Akhmatkhanov A., Shur V. Nanohydrodynamic local compaction and nanoplasmonic form-birefringence inscription by ultrashort laser pulses in nanoporous fused Silica // Nanomaterials. 2022. V. 12. № 20. P. 3613. https://doi.org/10.3390/nano12203613
20. Itina T.E., Zakoldaev R.A., Sergeev M.M., Ma H., Kudryashov S.I., Medvedev O.S., Veiko V.P. Ultra-short laser-induced high aspect ratio densification in porous glass // Optical Materials Express. 2019. V. 9. № 11. P. 4379–4389. https://doi.org/10.1364/OME.9.004379
21. Bykov E.P., Zakoldaev R.A., Andreeva N.V., Shishkina A.S., Yandybaeva Y.I., Andreeva O.V. Production of nanoporous silicate matrices — problems of optical homogeneity // Journal of Optical Technology. 2022. V. 89. № 3. P. 161–168. https://doi.org/10.1364/JOT.89.000161
22. Ma H., Zakoldaev R.A., Rudenko A., Sergeev M.M., Veiko V.P., Itina T.E. Well-controlled femtosecond laser inscription of periodic void structures in porous glass for photonic applications // Optics express. 2017. V. 25. № 26. P. 33261–33270. https://doi.org/10.1364/OE.25.033261
23. Liao Y., Ni J., Qiao L., Huang M., Bellouard Y., Sugioka K., Cheng Y. High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation // Optica. 2015. V. 2. № 4. P. 329–34. https://doi.org/10.1364/OPTICA.2.000329
24. Kudryashov S.I., Danilov P.A., Rupasov A.E., Smayev M.P., Kirichenko A.N., Smirnov N.A., Ionin A.A., Zolot'ko A.S., Zakoldaev R.A. Birefringent microstructures in bulk fluorite produced by ultrafast pulsewidth-dependent laser inscription // Applied Surface Science. 2021. V. 568. P. 150877. https://doi.org/10.1016/j.apsusc.2021.150877
25. Liu Z., Xu J., Lin Z., Qi J., Li X., Zhang A., Lin J., Chen J., Fang Z., Song Y., Chu W. Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication // Optics & Laser Technology. 2021. V. 141. P. 107118. https://doi.org/10.1016/j.optlastec.2021.107118
26. Xu J., Sima F., Sugioka K. Femtosecond laser direct writing for 3D microfluidic biochip fabrication // Laser Micro-Nano-Manufacturing and 3D Microprinting. 2020. P. 247–272. https://doi.org/10.1007/978-3-030-59313-1_8
