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Журнал с 01.12.2015 допущен ВАК для публикации основных результатов диссертаций как издание, входящее в международные реферативные базы систем цитирования (Web Science, Scopus) (см. Vak.ed.gov.ru Перечень журналов МБД 16.03.2018г)

Аннотации (03.2014) : Smoothing Evolution Model for Computer Controlled Optical Surfacing

Smoothing Evolution Model for Computer Controlled Optical Surfacing

© 2014 г.    Y. Shu1,2, PhD candidate of mechanical engineering; X. Nie1, PhD candidate of mechanical engineering;  F. Shi1*, Doctor of mechanical engineering; S. Li1, Professor of mechanical engineering

1College of Mechatronics and Automation, National University of Defense Technology, Changsha, Hunan, China

2Department of Ordnance Engineering, The First Aeronautical Institute of Air Force, Xinyang, Henan, China

*Е­mail: letter2prec@gmail.com

A polishing pad can smooth out mid­to­high spatial frequency errors automatically due to its rigidity and modeling of the smoothing effect is important. The relationship between surface error and polishing time is built here based on Bridging model and Preston’s equation. A series of smoothing experiments using pitch tools under different motion manners were performed and the results verified exponential decay between surface error and smoothing time. At the same time, parameters describing smoothing efficiency and smoothing limit were also fitted from the results. This method can be applied to predict the smoothing effect, estimate the smoothing time and compare smoothing rates of different runs.

Key words: Computer Controlled Optical Surfacing, mid­to­high spatial frequency errors, smoothing efficiency, smoothing evolution model.

OCIS codes: 220.4610, 220.5450.

Received by Editorial Office 15.10.2013.

 

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