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Журнал с 01.12.2015 допущен ВАК для публикации основных результатов диссертаций как издание, входящее в международные реферативные базы систем цитирования (Web Science, Scopus) (см. Vak.ed.gov.ru Перечень журналов МБД 16.03.2018г)

Аннотации (06.2015) : PERIODIC NANO-HOLE ARRAYS STRUCTURE INDUCED ON SILICON SURFACE BY DIRECT WRITING WITH FEMTOSECOND LASER

PERIODIC NANO-HOLE ARRAYS STRUCTURE INDUCED ON SILICON SURFACE BY DIRECT WRITING WITH FEMTOSECOND LASER

 

© 2015    D. Q. Yuan*; M. Zhou**; Q. R Wu*; J. T. Xu*; H. F. Yang***

*     Department of Mathematics and Physics, Huai Hai Institute of Technology, Lianyungang, Jiangsu 222005, China

**   Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

*** College of Mechanical and Electrical Engineering, China University of Mining and Technology, Xuzhou 221116, China

Е-mail: mz_laser@126.com

Regular micro-apparatus covered with periodic nano-hole, nano-ridge and ripple structures on silicon bulk (with crystal orientation of 110) were formed by micro-machining with tightly focused beam of the femtosecond laser with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130 fs in air. Use laser direct writing technology to form periodic double rows nano-holes structures and the laser was focus with a 10 focusing objective lens (NA = 0.3). Investigating the relationship between the width of structures and the speed of processing to provide knowledge of the evolvement of the nano-hole and nano-ridge structures.

Key words: Femtosecond laser; nano-hole arrays; ripples; direct writing.

OCIS codes :220.4610, 140.3290

Submitted 09.01.2014

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