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Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [на англ. яз.] // Оптический журнал. 2013. Т. 80. № 5. С. 94–97.
Qing Tao, Fengguang Luo, Jinxing Zhang, Bingcheng Mo, Rui Zhong, Dandan Miao, Xiaoxing Pan, Qianliang Liang Analysis of fabrication tolerance based on uneven thickness of Su8-photo-resist [in English] // Opticheskii Zhurnal. 2013. V. 80. № 5. P. 94–97.
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Аннотация
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