Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кручинин Д.Ю. Исследование возможности уменьшения угловых погрешностей круговых оптических шкал, изготовленных способом обратной фотолитографии // Оптический журнал. 2013. Т. 80. № 8. С. 42–45.

Kruchinin D. Yu. Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography [in Russian] // Opticheskii Zhurnal. 2013. Т. 80. № 8. P. 42–45.

For citation (Journal of Optical Technology):

D. Yu. Kruchinin, "Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography," Journal of Optical Technology. 80(8), 499-501 (2013). https://doi.org/10.1364/JOT.80.000499

Abstract:

This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator.

Keywords:

circular optical scale, limb, angular error, laser image generator

References:

D. Yu. Kruchinin, “Method of fabricating optical scales by lift-off photolithography,” Russian Patent No. 2 370 799 (2009).
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D. Yu. Kruchinin and O. B. Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].

D. Yu. Kruchinin, O. B. Yakovlev, and M. P. Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].
D. Yu. Kruchinin and O. B. Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.