УДК: 681.3: 681.7.023.72

Variation of the surface roughness of CVD ZnSe undergoing mechanical processing as a function of the grain size of the suspension

E. Yu. Vilkova Е.Y., Timofeev O.V., Nosov S.А., Dubovoĭ А.N.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Вилкова Е.Ю., Тимофеев О.В., Носов С.А., Дубовой А.Н. Изменение шероховатости поверхности CVD–ZnSe при механической обработке в зависимости от размера зерна суспензии // Оптический журнал. 2013. Т. 80. № 9. С. 68–72.

Vilkova E. Yu., Timofeev O. V., Nosov S. A., and Dubovoĭ A. N. Variation of the surface roughness of CVD ZnSe undergoing mechanical processing as a function of the grain size of the suspension // Opticheskii Zhurnal. 2013. V. 80. №9. P. 68–72.

For citation (Journal of Optical Technology):

E. Yu. Vilkova, O. V. Timofeev, S. A. Nosov, and A. N. Dubovoĭ, "Variation of the surface roughness of CVD ZnSe undergoing mechanical processing as a function of the grain size of the suspension," Journal of Optical Technology. 80(9), 577-581 (2013). https://doi.org/10.1364/JOT.80.000577

Abstract:

This paper discusses how the grain size of the processing suspension affects the variation of the surface roughness of zinc selenide during its mechanical processing. Atomic-force microscopy is used to establish how the arithmetic mean and rms roughness of the ground and polished surface depends on the abrasive grain size. It is shown that the arithmetic mean and rms deviation that characterizes the surface roughness decreases nonlinearly as the abrasive grain size decreases.

Keywords:

zinc selenide, micropores, polishing, surface roughness, standard deviation, arithmetic mean deviation

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