УДК: 621.382, 621.383.5

Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more

Demiyanenko, M.A., Esaev, D.G., Klimenko, A.G., Kozlov, A.I., Marchishin, I.V., Novoselov, A.R., Ovsyuk, V.N.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Демьяненко М.А., Есаев Д.Г., Клименко А.Г., Козлов А.И., Марчишин И.В., Новоселов А.Р., Овсюк В.Н. Преобразование изображений в мозаичных неохлаждаемых микроболометрических приемниках инфракрасного и терагерцового диапазонов форматом до 3072х576 и более // Оптический журнал. 2014. Т. 81. № 3. С. 35–43.

Demiyanenko M.A., Esaev D.G., Klimenko A.G., Kozlov A.I., Marchishin I.V., Novoselov A.R., Ovsyuk V.N. Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more [in Russian] // Opticheskii Zhurnal. 2014. V. 81. № 3. P. 35–43.

For citation (Journal of Optical Technology):

M. A. Dem’yanenko, D. G. Esaev, A. G. Klimenko, A. I. Kozlov, I. V. Marchishin, V. N. Ovsyuk, and A. R. Novoselov, "Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more," Journal of Optical Technology. 81(3), 139-145 (2014). https://doi.org/10.1364/JOT.81.000139

Abstract:

This paper discusses the process-design principles for creating hyperlarge-format mosaic photodetectors (MPDs), based on the butt-joining process of silicon chips with uncooled small-format microbolometer detector arrays (MBDAs). The basic unit is investigated and optimized for the process operations of laser scribing as part of the high-precision butt-joining process of chips in which the process part of the blind zone between the photosensitive edge elements of adjacent MBDA chips has a total size no greater than 30 μm. The design and layout are synthesized for 384×288-format silicon multiplexers, from which a 3072×576-format MPD fabricated using the butt-joining process developed here can provide better than 99% image-conversion efficiency for IR microbolometers and up to 100% for terahertz-range microbolometers.

Keywords:

mosaic photodetector, microbolometer, silicon multiplexer, IR region, terahertz region, scribing, pulsed nanosecond laser

Acknowledgements:

The authors are grateful to Academician A. L. Aseev for supporting the scientific research work of this specialization and to V. V. Filippova for help in designing the photomasks.

OCIS codes: 040.3060, 110.3080, 130.5990

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