Smoothing evolution model for computer controlled optical surfacing

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Y. Shu, X. Nie, F. Shi, S. Li Smoothing evolution model for computer controlled optical surfacing [на англ. яз.] // Оптический журнал. 2014. Т. 81. № 3. С. 67–71.

Y. Shu, X. Nie, F. Shi, S. Li Smoothing evolution model for computer controlled optical surfacing [in English] // Opticheskii Zhurnal. 2014. V. 81. № 3. P. 67–71.

For citation (Journal of Optical Technology):

Y. Shu, X. Nie, F. Shi, and S. Li, "Smoothing evolution model for computer controlled optical surfacing," Journal of Optical Technology. 81(3), 164-167 (2014). https://doi.org/10.1364/JOT.81.000164

Abstract:

A polishing pad can smooth out mid-to-high spatial frequency errors automatically due to its rigidity and modeling of the smoothing effect is important. The relationship between surface error and polishing time is built here based on the Bridging model and Preston’s equation. A series of smoothing experiments using pitch tools under different motion manners were performed and the results verified exponential decay between surface error and smoothing time. At the same time, parameters describing smoothing efficiency and smoothing limit were also fitted from the results. This method can be applied to predict the smoothing effect, estimate the smoothing time and compare smoothing rates of different runs.

Keywords:

Computer Controlled Optical Surfacing, mid-to-high spatial frequency errors, smoothing efficiency, smoothing evolution model

Acknowledgements:

This work was supported in part by the National Natural Science Foundation of China (Grant Nos. 91023042 and 60908022) and the Ministry of Science and Technology “973” Plan (No. 2011CB013200).

OCIS codes: 220.4610, 220.5450

References:

1. J. S. Taylor, G. E. Sommargren, D. W. Sweeney, and R. M. Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
2. J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
3. R. E. Parks, “Specifications: Figure and finish are not enough,” Proc. SPIE 7071, 70710B (2008).
4. N. J. Brown and R. E. Parks, “The polishing-to-figuring transition in turned optics,” Proc. SPIE 0306, 58–65 (1982).
5. R. A. Jones, “Computer simulation of smoothing during computer-controlled optical polishing,” Appl. Opt. 34, 1162–1169 (1995).
6. P. K. Mehta and P. B. Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” Proc. SPIE 3786, 447–459 (1999).
7. D. W. Kim, W. H. Park, H. K. An, and J. H. Burge, “Parametric smoothing model for visco-elastic polishing tools,” Opt. Express 18, 22515–22526 (2010).