УДК: 544.032.65, 537.9

Features of laser oxidation of thin films of titanium

Shakhno, E.A., Sinev, D.A., Kulazhkin, A.M.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Шахно Е.А., Синев Д.А., Кулажкин А.М. Особенности лазерного окисления тонких пленок титана // Оптический журнал. 2014. Т. 81. № 5. С. 93–98.

Shakhno E.A., Sinev D.A., Kulazhkin A.M. Features of laser oxidation of thin films of titanium [in Russian] // Opticheskii Zhurnal. 2014. V. 81. № 5. P. 93–98.

For citation (Journal of Optical Technology):

E. A. Shakhno, D. A. Sinev, and A. M. Kulazhkin, "Features of laser oxidation of thin films of titanium," Journal of Optical Technology. 81(5), 298-302 (2014). https://doi.org/10.1364/JOT.81.000298

Abstract:

This paper discusses the possibility of direct single-stage thermochemical recording on thin-film titanium, based on the difference of the optical properties of the film in the irradiated and unirradiated areas. A technique is proposed for theoretically analyzing the process of oxidizing thin metallic films, allowing for the change of the film’s absorptivity during irradiation. The main regularities of the process of laser oxidation of titanium films are determined, and, among other things, it is shown that it is preferable to use the thinnest possible films for thermochemical recording.

Keywords:

laser oxidation, thin metallic films, absorptivity

Acknowledgements:

This work was carried out with state financial support of the leading universities of the Russian Federation (Subsidy 074-U01).
The work was supported by initiative projects of the Russian Foundation for Basic Research Nos. 12-02-00974-a and 13-02-00971-a. The authors thank Professor V. P. Veı˘ko for valuable discussions, as well as graduate students V. A. Kochetova and A. D. Kochetov of the Department of Laser Technologies and Ecological Instrumentation for help in carrying out the thermal-vision measurements.

OCIS codes: 350.3390, 310.6860

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