УДК: 535.372, 533.9.072

Photoluminescence properties of porous silicon formed on plasma-processed substrates

Bozhenko, M.V., Yan, D.T., Chusovitin, E.A., Rasin, A.B.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Боженко М.В., Ян Д.Т., Чусовитин Е.А., Расин А.Б. Фотолюминесцентные свойства пористого кремния, сформированного на подложках, обработанных плазмой // Оптический журнал. 2015. Т. 82. № 11. С. 75–78.

Bozhenko M.V., Yan D.T., Chusovitin E.A., Rasin A.B. Photoluminescence properties of porous silicon formed on plasma-processed substrates [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 11. P. 75–78.

For citation (Journal of Optical Technology):

M. V. Bozhenko, D. T. Yan, E. A. Chusovitin, and A. B. Rasin, "Photoluminescence properties of porous silicon formed on plasma-processed substrates," Journal of Optical Technology. 82(11), 774-776 (2015). https://doi.org/10.1364/JOT.82.000774

Abstract:

Measurements have been made of the photoluminescence spectra of samples of porous silicon after they were processed with a compression plasma flow in a nitrogen atmosphere. A significant increase of the photoluminescence of the test samples is detected by comparison with porous silicon obtained by the usual technique.

Keywords:

porous silicon, compression plasma flow, photoluminescence, transmission spectra

OCIS codes: 250.0250, 300.0300, 310.0310, 160.0160

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