УДК: 535.39

Study of the optical properties of lead zirconate–titanate layers obtained by magnetron sputtering

Mavlyanov, R.K., Vinogradov, A.Y., Tolmachev, V.A.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Мавлянов Р.К., Виноградов А.Я., Толмачёв В.А. Исследование оптических свойств слоёв цирконат-титаната свинца, получаемых методом магнетронного распыления // Оптический журнал. 2015. Т. 82. № 2. С. 3–8.

Mavlyanov R.K., Vinogradov A.Ya., Tolmachev V.A. Study of the optical properties of lead zirconate–titanate layers obtained by magnetron sputtering [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 2. P. 3–8.

For citation (Journal of Optical Technology):

R. K. Mavlyanov, A. Ya. Vinogradov, and V. A. Tolmachev, "Study of the optical properties of lead zirconate–titanate layers obtained by magnetron sputtering," Journal of Optical Technology. 82(2), 64-67 (2015). https://doi.org/10.1364/JOT.82.000064

Abstract:

Lead zirconate–titanate films to be used as the active and adhesion layers in a ferroelectric structure have been studied. The layers are obtained by magnetron sputtering on platinum-coated silicon substrates, and spectral ellipsometry is used to determine their optical characteristics. The ellipsomeric angles were measured in the 250–900-nm wavelength range, and the thicknesses (213 and 54 nm) and the dispersion of the optical constants (the refractive and absorption indices) were determined on the basis of two optical models of the layers.

Keywords:

dispersion of optical constants, magnetron sputtering, spectral ellipsometry, lead zirconate–titanate

Acknowledgements:

The authors are grateful to Academician I. V. Grekhov for valuable comments in discussing this article, to N. A. Feoktistov for measurements on the atomic-force microscope, and to I. B. Korkin for help in designing and fabricating the process apparatus.

OCIS codes: 310.6860, 240.2130

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