УДК: 535.417, 535.317, 778.38

Synthesizing hologram–projectors for photolithography on nonplanar surfaces

Koreshev, S.N., Nikanorov, O.V., Smorodinov, D.S., Gromov, A.D.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Корешев С.Н., Никаноров О.В., Смородинов Д.С., Громов А.Д. Синтез голограмм-проекторов для фотолитографии на неплоских поверхностях // Оптический журнал. 2015. Т. 82. № 2. С. 37–42.

Koreshev S.N., Nikanorov O.V., Smorodinov D.S., Gromov A.D. Synthesizing hologram–projectors for photolithography on nonplanar surfaces [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 2. P. 37–42.

For citation (Journal of Optical Technology):

S. N. Koreshev, O. V. Nikanorov, D. S. Smorodinov, and A. D. Gromov, "Synthesizing hologram–projectors for photolithography on nonplanar surfaces," Journal of Optical Technology. 82(2), 90-94 (2015). https://doi.org/10.1364/JOT.82.000090

Abstract:

This paper discusses how binarization and diffuse illumination of an object affect the depth of field of an image reconstructed by means of synthesized Fresnel hologram–projectors. It presents the results of an experimental study that confirm the possibility and efficiency of using a specialized software complex to synthesize and reconstruct Fresnel hologram–projectors intended for the implementation of a holographic version of the photolithographic process on nonplanar surfaces.

Keywords:

hologram synthesis, curvilinear surface, photolythography, volume object, Fresnel hologram–projector, depth of field, binarization, diffuse illumination

OCIS codes: 090.0090

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