УДК: 681.7.064

How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кручинин Д.Ю., Фарафонтова Е.П. Влияние углового расположения фотошаблона при синтезе круговых оптических шкал на их угловые погрешности // Оптический журнал. 2015. Т. 82. № 6. С. 72–76.

Kruchinin D.Yu., Farafontova E.P. How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 6. P. 72–76.

For citation (Journal of Optical Technology):

D. Yu. Kruchinin and E. P. Farafontova, "How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced," Journal of Optical Technology. 82(6), 385-387 (2015). https://doi.org/10.1364/JOT.82.000385

Abstract:

This paper discusses how the angular disposition of a photomask during the production of circular optical scales fabricated by lift-off photolithography using this photomask affects their accumulated angular error. The angular errors of the circular optical scales are investigated by using a phase–statistical method, and the errors are determined that are introduced into the angular errors of the scale in conjunction with the image generator and the exposure operation.

Keywords:

circular scale, dial, photomask, image generator, substrate, exposure, angular error, apparatus for dials monitoring

OCIS codes: 110.5220

References:

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