УДК: 53.087.92, 681.7.064

A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кручинин Д.Ю., Фарафонтова Е.П. Исследование влияния использования иммерсионной жидкости на угловые погрешности лимбов, изготовленных методом обратной фотолитографии // Оптический журнал. 2016. Т. 83. № 1. С. 90–93.

Kruchinin D.Yu., Farafontova E.P. A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 1. P. 90–93.

For citation (Journal of Optical Technology):

D. Yu. Kruchinin and E. P. Farafontova, "A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography," Journal of Optical Technology. 83(1), 69-71 (2016). https://doi.org/10.1364/JOT.83.000069

Abstract:

We discuss the results of a study of the effect of immersion fluid used in contact exposures in the process of lift-off photolithography on the angular errors in circular optical scales (dials).

Keywords:

circular optical scale (dial), angular error, lift-off photolithography

OCIS codes: 110.5220

References:

1. D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, “Study of the angular errors of dials fabricated by inverse photolithography,” J. Opt. Technol. 76(6), 373–376 (2009) [Opt. Zh. 76(6), 70–74 (2009)].
2. D. Yu. Kruchinin, “Method for fabrication of optical scales by inverse photolithography,” Russian patent 2370799 (2009).
3. Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” J. Opt. Technol. 73(8), 544–547 (2006) [Opt. Zh. 73(8), 61–65 (2006)].
4. D. Yu. Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” J. Opt. Technol. 77(6), 387–390 (2010) [Opt. Zh. 76(6), 46–50 (2010)].
5. S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. V. Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Proceedings of the 10th IMEKO TC7 International Symposium (St. Petersburg, 2004), pp. 316–320, http://www.imeko.org/publications/tc7‑2004/IMEKO‑TC7‑2004‑092.pdf.