УДК: 535.421

Method and software system for synthesis of focused-image hologram projectors

Koreshev, S.N., Korepin, I.N., Vakhnin, M.S.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Корешев С.Н., Корепин И.Н., Вахнин М.С. Метод синтеза голограмм-проекторов сфокусированного изображения и программный комплекс на его основе // Оптический журнал. 2016. Т. 83. № 2. С. 40–48.

Koreshev S.N., Korepin I.N., Vakhnin M.S. Method and software system for synthesis of focused-image hologram projectors [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 2. P. 40–48.

For citation (Journal of Optical Technology):

S. N. Koreshev, I. N. Korepin, and M. S. Vakhnin, "Method and software system for synthesis of focused-image hologram projectors," Journal of Optical Technology. 83(2), 106-112 (2016). https://doi.org/10.1364/JOT.83.000106

Abstract:

We discuss implementation of a photolithographic process based on synthesized focused-image holograms used in combination with a low-quality objective. Such systems have shown promise for photolithography at extremely short wavelengths. We develop a lookup-table-based synthesis method for focused-image holograms. This method is then used to develop a software system for digital image reconstruction and synthesis in focused-image hologram projectors. We show that such a system has promising applications in the field of photolithography.

Keywords:

holography, photolithography, synthesized focused-image hologram, projector optical system

OCIS codes: 090.1760

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