УДК: 538.958, 539.234
Study of thin-film heterostructures produced by laser deposition of a platinum and a lead zirconate titanate layer
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Мавлянов Р.К., Виноградов А.Я., Калинин Д.А., Толмачёв В.А. Исследование тонкоплёночной гетероструктуры, получаемой с помощью лазерного напыления слоёв платины и цирконат-титаната свинца // Оптический журнал. 2016. Т. 83. № 7. С. 32–37.
Mavlyanov R.K., Vinogradov A.Ya., Kalinin D.A., Tolmachev V.A. Study of thin-film heterostructures produced by laser deposition of a platinum and a lead zirconate titanate layer [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 7. P. 32–37.
R. K. Mavlyanov, A. Ya. Vinogradov, D. A. Kalinin, and V. A. Tolmachev, "Study of thin-film heterostructures produced by laser deposition of a platinum and a lead zirconate titanate layer," Journal of Optical Technology. 83(7), 415-418 (2016). https://doi.org/10.1364/JOT.83.000415
We investigate the feasibility of using laser deposition to produce Pt and lead zirconate titanate layers. Optical microscopy, electron microscopy, and atomic-force microscopy of the lead zirconate titanate layer reveal surface roughness on these layers. The optical parameters of the resulting layers were studied by spectral ellipsometry, including the dispersion in the index of refraction and absorption coefficient of the Pt and lead zirconate titanate surface layer. X-ray crystallography indicates that the lead zirconate titanate layer produced has the classical (111) perovskite crystallographic orientation. Similar heterostructures are used as ferroelectric memory elements.
optical constants dispersion, laser deposition, spectral ellipsometry, lead zirconate titanate
Acknowledgements:The authors thank Academician I. V. Grekhov for useful advice, Yu. A. Zharova for preparing the samples in advance of the microscopic studies and for useful discussion, N. A. Feoktistov for the AFM measurements, A. V. Nashchekin for assistance in obtaining the SEM images, and N. V. Zaı˘tseva for the X-ray crystallography.
OCIS codes: 310.6860, 240.2130
References:1. K. A. Vorotilov and A. S. Sigov, “Ferroelectric memory,” Phys. Solid State 54(5), 894–899 (2012) [Fiz. Tverd. Tela, 54(5), 843–848 (2012)].
2. R. K. Mavlyanov, A. Ya. Vinogradov, and V. A. Tolmachev, “Study of the optical properties of lead zirconate–titanate layers obtained by magnetron sputtering,” J. Opt. Technol. 82(2), 64–67 (2015) [Opt. Zh. 82(2), 3–8 (2015)].
3. K. K. Vorotilov and A. G. Sigov, “Ferroelectric memories: promising technologies and materials,” Nano- Mikrosist. Tekh. 10(99), 30–42 (2008).
4. M. R. Predtechensky and A. P. Mayorov, “Expansion of laser plasma in oxygen at laser deposition of HTSC films: theoretical model,” Appl. Supercond. 1(10–12), 2011–2017 (1993) [Sverkhprovodimost’: Fiz., Khim., Tekh. 6(5), 1018–1032 (1993)].
5. V. A. Shvets, E. V. Spesivtsev, S. V. Rykhlitskii, and N. N. Mikhailov, “Ellipsometry as a high-precision technique for subnanometer-resolved monitoring of thin-film structures,” Nanotechnol. Russ. 4(3–4), 201–214 (2009) [Rosiı˘sk. Nanotekhnol. 4(3–4), 201–214 (2009)].
6. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland Publishing Company, Amsterdam, 1977; Mir, Moscow, 1981).
7. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic Press, Orlando, 1985).
8. D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen,” Ann. Phys. (Leipzig) 416(7), 636–664 (1935).
9. J. Koh, Y. Lu, C. R. Wronski, Y. Kuang, R. W. Collins, T. T. Tseng, and Y. E. Strausser, “Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films,” Appl. Phys. Lett. 69(9), 1297–1299 (1996).
10. P. D. Thacher, “Refractive index and surface layers of ceramic (Pb, La) (ZrTi)O3 compounds,” Appl. Opt. 16(12), 3210–3213 (1977).
11. H. Lee, Y. S. Kang, S.-J. Cho, B. Xiao, H. Morkog, and T. J. Kang, “Visible-ultraviolet spectroscopic ellipsometry of lead zirconate titanate thin films,” Appl. Phys. Lett. 86, 262902 (2005).