Invariance of measurement results to the nonideal nature of transparent media when the accuracy of angle-measuring structures is being monitored

Kiriyanov, A.V., Kiriyanov, V.P.

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For Russian citation (Opticheskii Zhurnal):

Кирьянов А.В., Кирьянов В.П. Инвариантность результатов измерений к неидеальностям прозрачных носителей при контроле точности углоизмерительных структур // Оптический журнал. 2018. Т. 85. № 10. С. 43–49. http://doi.org/10.17586/1023-5086-2018-85-10-43-49

Kiriyanov A.V., Kiriyanov V.P. Invariance of measurement results to the nonideal nature of transparent media when the accuracy of angle-measuring structures is being monitored [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 10. P. 43–49. http://doi.org/10.17586/1023-5086-2018-85-10-43-49

For citation (Journal of Optical Technology):

A. V. Kir’yanov and V. P. Kir’yanov, "Invariance of measurement results to the nonideal nature of transparent media when the accuracy of angle-measuring structures is being monitored," Journal of Optical Technology. 85(10), 633-638 (2018). https://doi.org/10.1364/JOT.85.000633

Abstract:

This paper discusses features of the monitoring of the topology-formation error of angular dials, rasters, or multidigit code disks. It is shown that, when the fabrication accuracy of these items is monitored in the transillumination regime, existing angle-measuring machines are susceptible to perturbing action due to the nonideal nature of the transparent media of the test object. This article discusses the possibility of using repeated transmission of the probe beam through a transparent medium to implement a measurement process that is invariant to the nonideal properties of the optical substrate.

Keywords:

angle-measuring structure, element topology, angular error, angular measuring machine

Acknowledgements:

This research was carried out by means of a subsidy for the financial support of a state contract (Project IV, 36.1.3, State Registry No. 031920160009) at the Institute of Automation and Electrometry, Siberian Section, Russian Academy of Sciences.

OCIS codes: 230.4000, 230.0250, 230.0040, 120.5475

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