ru
Back
DOI: 10.17586/1023-5086-2018-85-10-64-69
УДК: 535.32, 535.34, 539.238
Method for determining the optical constants of films on absorbing substrates
Full text «Opticheskii Zhurnal»
Full text on elibrary.ru
Publication in Journal of Optical Technology
Котликов Е.Н., Новикова Ю.А., Юрковец Е.В. Метод определения оптических констант плёнок на поглощающих подложках // Оптический журнал. 2018. Т. 85. № 10. С. 64–69. http://doi.org/10.17586/1023-5086-2018-85-10-64-69
Kotlikov E.N., Novikova Yu.A., Yurkovets E.V. Method for determining the optical constants of films on absorbing substrates [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 10. P. 64–69. http://doi.org/10.17586/1023-5086-2018-85-10-64-69
E. N. Kotlikov, Yu. A. Novikova, and E. V. Yurkovets, "Method for determining the optical constants of films on absorbing substrates," Journal of Optical Technology. 85(10), 651-655 (2018). https://doi.org/10.1364/JOT.85.000651
We present a method to determine the optical constants (refractive indices and absorption coefficients) of films on substrates with absorption properties. The method is based on correction of the optical spectra of the films on the substrates by considering the absorption effect of the substrate. The spectra obtained after the correction are free from the influence of the absorption and can be analyzed by known methods for nonabsorbing films on nonabsorbing substrates. To illustrate the proposed method, an analysis of the spectra of CaY2F8 optical films was performed, and their optical constants were determined in the spectral range of 1.4−25 μm.
correction functions, films, substrates, silicon, fluorides, dispersion, refractive index, absorption coefficient, transmittance and absorbance spectra
Acknowledgements:This study was performed within the framework of the state task No. 3.8420.2017/BCh (Basic Part).
OCIS codes: 300.0300, 310.4165
References:1. R. R. Willey, Practical Production of Optical Thin Films (Optical Consultants, 2008).
2. E. N. Kotlikov, Y. A. Kuznetsov, N. P. Lavrovskaya, and A. N. Tropin, “Optical film-forming materials for the infrared spectral region,” Nauchn. Priborostr. 18(3), 32–37 (2008).
3. E. N. Kotlikov, Y. A. Novikova, and A. N. Tropin, Design and Fabrication of Interference Coatings (GUAP, SPb, 2016).
4. A. N. Tropin, “Film-forming materials for thin-layer optical coatings: new problems and prospects (review),” Usp. Prikl. Fiz. 4(2), 206–211 (2016).
5. L. Gao, F. Lemarchand, and M. Lequime, “Exploitation of multiple incidences spectrometric measurements for thin film reverse engineering,” Opt. Express 20(14), 15734–15750 (2012).
6. D. Poelman and P. F. Smet, “Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review,” J. Phys. D: Appl. Phys. 36, 1850–1857 (2003).
7. E. N. Kotlikov and E. V. Yurkovets, “Method of determining the optical constants of absorbing films: substrates with no absorption,” J. Opt. Technol. 85(1), 48–52 (2018) [Opt. Zh. 85(1), 59–64 (2018)].
8. M. A. Okatov, ed., Optical Technician’s Handbook (Mashinostroenie, Leningrad, 2004).
9. E. N. Kotlikov and Y. A. Novikova, “Optical constants of silicon in the range of 30–10000 cm -1,” Opt. Spectrosc. 120(5), 815–817 (2016) [Opt. Spektrosk. 120(5), 165–168 (2016)].
10. P. P. Yakovlev and B. B. Meshkov, Design of Interference Coatings (Mashinostroenie, Moscow, 1987).
11. O. P. Konovalova and I. I. Shaganov, “Determination of optical constants of weakly absorbing dielectric layers on a transparent substrate,” Opt.-Mekh. Prom-st 8, 39–41 (1988).
12. E. N. Kotlikov, “A spectrophotometric method for determination of optical constants of materials,” J. Opt. Technol. 83(2), 77–80 (2016) [Opt. Zh. 83(2), 3–7 (2016)].
13. M. Born and E. Wolf, Principles of Optics (Pergamon Press, 1970).
14. E. N. Kotlikov, A. N. Kotlikov, and E. V. Yurkovets, “Software for determination of optical constants of films,” in Modeling and Situational Management of the Quality of Complex Systems: Collection of Reports of GUAP’s Scientific Session (2016), pp. 253–257.