Enhancement of image conversion efficiency in mosaic microbolometer detector arrays

Demiyanenko, M.A., Novoselov, A.R., Kozlov, A.I., Ovsyuk, V.N.

Full text «Opticheskii Zhurnal»

Full text on elibrary.ru

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Демьяненко М.А., Новоселов А.Р., Козлов А.И., Овсюк В.Н. Повышение эффективности преобразования изображений в мозаичных микроболометрических приёмниках // Оптический журнал. 2018. Т. 85. № 2. С. 60–66. http://doi.org/10.17586/1023-5086-2018-85-02-60-66

Demiyanenko M.A., Novoselov A.R., Kozlov A.I., Ovsyuk V.N. Enhancement of image conversion efficiency in mosaic microbolometer detector arrays [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 2. P. 60–66. http://doi.org/10.17586/1023-5086-2018-85-02-60-66

For citation (Journal of Optical Technology):

M. A. Dem’yanenko, A. R. Novoselov, A. I. Kozlov, and V. N. Ovsyuk, "Enhancement of image conversion efficiency in mosaic microbolometer detector arrays," Journal of Optical Technology. 85(2), 110-114 (2018). https://doi.org/10.1364/JOT.85.000110

Abstract:

We study fabrication process and design opportunities for shrinking the “dead zones” in large-scale mosaic microbolometer detector arrays (MBDAs) for the infrared and terahertz regions. We perform a quantitative analysis of dead zones in mosaic photodetectors and describe the technology achievable by densely packing submodule chips into mosaic MBDAs with dead zone widths of 13–22 μm. We have also developed address-circuit designs that minimize dead zone widths in mosaic MBDAs.

Keywords:

large-scale mosaic photodetector, microbolometer photodetector, silicon multiplexer, infrared and terahertz regions, scribing of semiconductor wafers, nanosecond-pulse laser

Acknowledgements:

The authors are grateful to Academician A. L. Aseev for supporting research in this area and to V. V. Fillipova for developing various options for address units in multiplexers and for designing the photomasks.

OCIS codes: 040.3060, 110.3080, 130.5990

References:

1. A. Rogalski, “Progress in focal plane array technologies,” Prog. Quantum Electron. 36, 342–473 (2012).
2. A. R. Novoselov, “Method of reducing the gap between chips in mosaic photodetector modules,” Optoelectron. Instrum. Data Process. 52(1), 96–100 (2016) [Avtometriya 52(1), pp. 116–121 (2016)].
3. M. A. Dem’yanenko, A. I. Kozlov, A. R. Novoselov, and V. N. Ovsyuk, “Uncooled microbolometer mosaic focal plane arrays for the infrared and terahertz ranges,” Optoelectron. Instrum. Data Process. 52(2), 203–209 (2016) [Avtometriya 52(2), pp. 115–121 (2016)].
4. M. A. Dem’yanenko, D. G. Esaev, A. G. Klimenko, A. I. Kozlov, I. V. Marchishin, and V. N. Ovsyuk, “Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more,” J. Opt. Technol. 81(3), 139–145 (2014) [Opt. Zh. 81(3), 35–43 (2014)].
5. A. R. Novoselov, “Technique for fabricating chip edges in mosaic photodetector modules,” Russian Patent 2509391 (2014).
6. A. M. Orlov, A. A. Solov’ev, I. O. Yavtushenko, and A. A. Skvortsov, “On the redistribution of dislocations in silicon single crystals in the vicinity of stress concentrators,” Phys. Solid State 49(6), 1093–1097 (2007) [Fiz. Tverd. Tela 49(6), 1039–1043 (2007)].
7. Z. Yu. Gotra, Microelectronic Device Technology (Radio i Svyaz, Moscow, 1991) [in Russian].
8. M. A. Dem’yanenko, A. I. Kozlov, I. V. Marchishin, and V. N. Ovsyuk, “Development of analog-digital readout integrated circuits for infrared focal plane arrays,” Optoelectron. Instrum. Data Process. 52(6), 630–636 (2016) [Avtometriya 52(6), 120–127 (2016)].
9. A. I. Kozlov, “Analysis of design principles of silicon multiplexer circuits for multielement infrared focal plane arrays,” Optoelectron. Instrum. Data Process. 46(1), 96–105 (2010) [Avtometriya 46(1), 118–129 (2010)].
10. M. A. Dem’yanenko, D. G. Esaev, A. I. Kozlov, I. V. Marchishin, and V. N. Ovsyuk, “Shift register (options),” Russian Patent 2530271 (2014).
11. M. A. Dem’yanenko, D. G. Esaev, A. G. Klimenko, A. I. Kozlov, I. V. Marchishin, V. N. Ovsyuk, and V. V. Filippova, “Silicon multiplexer,” Russian Patent 2602373 (2016).
12. M. A. Dem’yanenko, A. R. Novoselov, A. I. Kozlov, D. G. Esaev, and V. N. Ovsyuk, “Mosaic principle for development of extremely large uncooled microbolometer detectors,” in Abstracts of Papers from the Fotonika Conference and School of Young Scientists on Current Issues in Semiconductor Photoelectronics (Novosibirsk, 2017), p. 153 [in Russian].