Optical and operational characteristics of diamond-like films deposited using a Hall ion beam source

Baranov, A.N., Mikhailov, A.V.

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Баранов А.Н., Михайлов А.В. Оптические и эксплуатационные характеристики алмазоподобных пленок, осажденных из ионного пучка источника с эффектом Холла // Оптический журнал. 2018. Т. 85. № 3. С. 69–71. http://doi.org/10.17586/1023-5086-2018-85-03-69-71

Baranov A.N., Mikhailov A.V. Optical and operational characteristics of diamond-like films deposited using a Hall ion beam source [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 3. P. 69–71. http://doi.org/10.17586/1023-5086-2018-85-03-69-71

For citation (Journal of Optical Technology):

A. N. Baranov and A. V. Mikhaĭlov, "Optical and operational characteristics of diamond-like films deposited using a Hall ion beam source," Journal of Optical Technology. 85(3), 179-181 (2018). https://doi.org/10.1364/JOT.85.000179

Abstract:

Data on diamond-like carbon films obtained by deposition from an ion beam formed by a Hall source are presented. The dependences of the film deposition rate on the anode voltage and source current are determined. The ranges of optimal anode current values for the synthesis of antireflective single-layer coatings on germanium and silicon optical elements are found. It is shown that the diamond-like carbon films deposited on both sides of a germanium element ensure a maximum transmittance of 99.6% in the wavelength range of 3–5 μm at a high mechanical strength.

Keywords:

optical coatings, optical characteristics, operational characteristics, diamond-like films

OCIS codes: 310.1860, 310.1210, 160.4760

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