Digital goniometer with a two-dimensional scale

Bokhman, E.D., Venediktov, V.Y., Korolev A.N., Lukin, A.Y.

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Бохман Е.Д., Венедиктов В.Ю., Королёв А.Н., Лукин А.Я. Цифровой измеритель угла с двумерной шкалой // Оптический журнал. 2018. Т. 85. № 5. С. 19–25. http://doi.org/10.17586/1023-5086-2018-85-05-19-25

Bokhman E.D. , Venediktov V.Yu., Korolev A.N., Lukin A.Ya. Digital goniometer with a two-dimensional scale [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 5. P. 3–6. http://doi.org/10.17586/1023-5086-2018-85-05-19-25

For citation (Journal of Optical Technology):

E. D. Bokhman, V. Yu. Venediktov, A. N. Korolev, and A. Ya. Lukin, "Digital goniometer with a two-dimensional scale," Journal of Optical Technology. 85(5), 269-274 (2018). https://doi.org/10.1364/JOT.85.000269

Abstract:

This paper presents the results of experimental and modeling metrological studies on a digital goniometer, measuring angular orientations of an image of an optical mark using a digital camera array. A fully digital technology is also described for measuring angles using virtual angular-scale carriers (digital images). By using a mathematical model for the goniometer, it is shown that the error in angle measurements can be reduced to the level of thousandths of an arcsecond in principle.

Keywords:

measurement of rotation angle, optical mark, angular position of mark, photodetector matrix, mathematical model, measurement error

OCIS codes: 100.2000, 120.3930

References:

1. HEIDENHAIN GmbH, www.heidenhain.de.
2. Renishaw, www.renishaw.com.
3. Special Design Bureau for Measuring Systems (SKB IS), www.skbis.ru.
4. S. V. Gordeev and B. G. Turukhano, “Investigation of the interference field of two spherical waves for holographic recoding of precision radial diffraction gratings,” Opt. Laser Technol. 28(5), 255–261 (1996).
5. M. N. Burnashev, P. A. Pavlov, and Yu. V. Filatov, “Development of precision laser goniometric systems,” Quantum Electron. 43(2), 130–138 (2013) [Kvant. Elektron. 43(2), 130–138 (2013)].
6. A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the shape of an optical mark in digital measuring systems,” J. Opt. Technol. 77(6), 370–372 (2010) [Opt. Zh. 77(6), 25–27 (2010)].
7. A. B. Bel’skiı˘, M. A. Gan, I. A. Mironov, and R. P. Seı˘syan, “Prospects for the development of optical systems for nanolithography,” J. Opt. Technol. 76(8), 496–503 (2009) [Opt. Zh. 76(8), 59–69 (2009)].
8. A. N. Korolev and A. I. Gartsuev, “Investigation of the accuracy of image positioning on a CCD array,” Izmer. Tekh. 5, 20–22 (2004).
9. J. A. Stone, M. Amer, B. Faust, and J. Zimmerman, “Uncertainties in small-angle measurement systems used to calibrate angle artifacts,” J. Res. Natl. Inst. Stand. Technol. 109(3), 319–333 (2004).