Monitoring two-coordinate positioning by means of optical spectral coding

Likhachev, I.G., Pustovoy, V.I., Svetikov, V.V., Krasovskiy, V.I.

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Лихачёв И.Г., Пустовой В.И., Светиков В.В., Красовский В.И. Контроль двухкоординатного позиционирования с помощью оптического спектрального кодирования // Оптический журнал. 2018. Т. 85. № 5. С. 3–6. http://doi.org/10.17586/1023-5086-2018-85-05-03-06

Likhachev I.G., Pustovoy V.I., Svetikov V.V., Krasovskiy V.I. Monitoring two-coordinate positioning by means of optical spectral coding [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 5. P. 3–6. http://doi.org/10.17586/1023-5086-2018-85-05-03-06

For citation (Journal of Optical Technology):

I. G. Likhachev, V. I. Pustovoĭ, V. V. Svetikov, and V. I. Krasovskiĭ, "Monitoring two-coordinate positioning by means of optical spectral coding," Journal of Optical Technology. 85(5), 255-258 (2018). https://doi.org/10.1364/JOT.85.000255

Abstract:

Based on spectral coding of broadband radiation, a technique has been developed that makes it possible to monitor the position of a two-coordinate stage and to control its movement with nanometer accuracy. A distinctive feature of the technique is that it makes it possible to monitor the absolute position of the stage without any preliminary calibration. Such devices may be of interest for high-precision systems where the probe is required to move to a given point of the sample with nanometric accuracy.

Keywords:

nanopositioning, Fabry-Perot interferometer, spectral coding, fiberoptic

OCIS codes: 060.2370, 070.4340, 120.2230, 240.5770

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