Estimation of metrological characteristics of a high-precision digital autocollimator using an angle encoder

Andreeva, T.A., Bokhman, E.D., Venediktov, V.Y., Gordeev, S.V., Korolev, A.N., Kosmina, M.A., Lukin, A.Y., Shur, V.L.

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For Russian citation (Opticheskii Zhurnal):

Андреева Т.А., Бохман Е.Д., Венедиктов В.Ю., Гордеев С.В., Королёв А.Н., Косьмина М.А., Лукин А.Я., Шур В.Л. Оценка метрологических характеристик высокоточного цифрового автоколлиматора с помощью углового энкодера // Оптический журнал. 2018. Т. 85. № 7. С. 39–43. http://doi.org/10.17586/1023-5086-2018-85-07-39-43

Andreeva T.A., Bokhman E.D., Venediktov V.Yu., Gordeev S.V., Korolev A.N., Kosmina M.A., Lukin A.Ya., Shur V.L. Estimation of metrological characteristics of a high-precision digital autocollimator using an angle encoder [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 7. P. 39–43. http://doi.org/10.17586/1023-5086-2018-85-07-39-43

For citation (Journal of Optical Technology):

T. A. Andreeva, E. D. Bokhman, V. Yu. Venediktov, S. V. Gordeev, A. N. Korolev, M. A. Kos’mina, A. Ya. Lukin, and V. L. Shur, "Estimation of metrological characteristics of a high-precision digital autocollimator using an angle encoder," Journal of Optical Technology. 85(7), 406-409 (2018). https://doi.org/10.1364/JOT.85.000406

Abstract:

The results of metrological studies of a high-precision digital autocollimator are presented. The estimation of device accuracy, design features of the measuring stand, dataset processing methods for the autocollimator, and comparator measurement results are discussed, which allow some error components to be eliminated.

Keywords:

digital autocollimator, encoder, angular measurement

Acknowledgements:

The research was supported by the Ministry of Education and Science of the Russian Federation (Minobrnauka) (8.1039.2017).

OCIS codes: 100.2000, 120.3930

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