Fabrication and flatness error analysis of low-stepped mirror in static Fourier transform infrared spectrometer

Zhang, Min, Liang, Jingqiu, Liang, Zhongzhu, Lu, Jinguang, Qin, Yuxin, Wang, Weibiao

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For Russian citation (Opticheskii Zhurnal):

Min Zhang, Jingqiu Liang, Zhongzhu Liang, Jinguang Lv, Yuxin Qin, Weibiao Wang Fabrication and flatness error analysis of low-stepped mirror in static Fourier transform infrared spectrometer (Создание зеркал с малым шагом ступенек для инфракрасного статического фурье-спектрометра и анализ ошибок их плоскостности) [на англ. яз.] // Оптический журнал. 2018. Т. 85. № 9. С. 74–83. http://doi.org/10.17586/1023-5086-2018-85-09-74-83

Min Zhang, Jingqiu Liang, Zhongzhu Liang, Jinguang Lv, Yuxin Qin, Weibiao Wang Fabrication and flatness error analysis of low-stepped mirror in static Fourier transform infrared spectrometer (Создание зеркал с малым шагом ступенек для инфракрасного статического фурье-спектрометра и анализ ошибок их плоскостности) [in English] // Opticheskii Zhurnal. 2018. V. 85. № 9. P. 74–83. http://doi.org/10.17586/1023-5086-2018-85-09-74-83

For citation (Journal of Optical Technology):

Min Zhang, Jingqiu Liang, Zhongzhu Liang, Jinguang Lv, Yuxin Qin, and Weibiao Wang, "Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer," Journal of Optical Technology. 85(9), 582-589 (2018). https://doi.org/10.1364/JOT.85.000582

Abstract:

In this study, we propose a Fourier transform infrared spectrometer based on stepped mirrors, which realize static. As the core component of the spectrometer, the low-stepped mirror’s structural parameters significantly affect the instrument performance. In order to successfully fabricate a low-stepped mirror with large area and sub-micron height, we propose a method involving multiple depositions accompanied by a 50% reduction in thickness at every iteration, which can precisely control the accuracy, consistency, and uniformity of the step height. After that, we fabricate a low-stepped mirror consisting of 32 stages and with a step height of 625 nm. Through theoretical calculation and simulation analysis, the influence of the step’s flatness error on the recovery spectrum is obtained. By increasing the substrate thickness of the stepped mirror, we can reduce the stress of the thin film. We perform experiments using the low-stepped mirror. The low-steppedmirror was incorporated into the Fourier transform infrared spectrometer, and we performed experiments to obtain the spectrum of acetonitrile liquid. The spectrogram of the acetonitrile is obtained by processing the interferogram.

Keywords:

spectroscopy, Fourier transform infrared spectrometer, spectrum analysis, low-stepped mirror

Acknowledgements:

This study was supported by a grant from the National Natural Science Foundation of China (NSFC) under grants 61627819, 61376122, 61575193, 6173000222 and 6172780148. Funding was also received from the Jilin Province Science and Technology Development Plan under grants 20150520101JH, 20150204072GX, 20150101049JC, and 20170204077GX, as well as the Youth Innovation Promotion Association of CAS under grant 2014193.

OCIS codes: 300.6190, 300.6300, 230.4000

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