Study of the resolution of direct recording of submicron structures on titanium films using millisecond laser pulses

Shakhno, E.A., Nguyen, Q.

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For Russian citation (Opticheskii Zhurnal):

Шахно Е.А., Нгуен К.З. Исследование разрешающей способности прямой записи субмикронных структур на плёнках титана миллисекундными лазерными импульсами // Оптический журнал. 2019. Т. 86. № 4. С. 69–73. http://doi.org/10.17586/1023-5086-2019-86-04-69-73

Shakhno E.A., Nguyen K.Z. Study of the resolution of direct recording of submicron structures on titanium films using millisecond laser pulses [in Russian] // Opticheskii Zhurnal. 2019. V. 86. № 4. P. 69–73. http://doi.org/10.17586/1023-5086-2019-86-04-69-73

For citation (Journal of Optical Technology):

E. A. Shakhno and K. Z. Nguyen, "Study of the resolution of direct recording of submicron structures on titanium films using millisecond laser pulses," Journal of Optical Technology. 86(4), 251-254 (2019). https://doi.org/10.1364/JOT.86.000251

Abstract:

The local laser oxidation of titanium thin films was simulated at submicron sizes of the irradiation region. Radial distributions of the film temperature, oxide layer thickness, and film transmittance were obtained, taking into account the temporal and spatial dependence of the film absorptivity on the thickness of the oxide layer formed. The calculation results revealed the conditions for achieving high resolution (a minimum size of a recorded image of 230 nm for the visible range) and high recording contrast simultaneously. The optimal ranges of radiation power density and film thickness were determined.

Keywords:

thin films, laser oxidation, resolution, diffractive optical elements, transmittance, contrast

Acknowledgements:

The authors thank V. P. Veyko for helpful discussions.The research was supported by the Russian Science Foundation (RSF) (grant No. 17-19-01721).

OCIS codes: 310.6860, 350.3390

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