Nonlinear control of piezoelectric actuator system for phase shift interferometer

Wang, Fang, Lu, Qingjie, Tang, Shouhong, Han, Sen, Zhu, Shuo

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For Russian citation (Opticheskii Zhurnal):

Fang Wang, Shuo Zhu, Qingjie Lu, Shouhong Tang, and Sen Han Nonlinear control of piezoelectric actuator system for phase shift interferometer (Нелинейное управление системой пьезоэлектрических актуаторов для фазового интерферометра сдвига) [на англ. яз.] // Оптический журнал. 2019. Т. 86. № 5. С. 45–50. http://doi.org/10.17586/1023-5086-2019-86-05-45-50

Fang Wang, Shuo Zhu, Qingjie Lu, Shouhong Tang, and Sen Han Nonlinear control of piezoelectric actuator system for phase shift interferometer (Нелинейное управление системой пьезоэлектрических актуаторов для фазового интерферометра сдвига) [in English] // Opticheskii Zhurnal. 2019. V. 86. № 5. P. 45–50. http://doi.org/10.17586/1023-5086-2019-86-05-45-50

For citation (Journal of Optical Technology):

Fang Wang, Shuo Zhu, Qingjie Lu, Shouhong Tang, and Sen Han, "Nonlinear control of a piezoelectric actuator system for a phase shift interferometer," Journal of Optical Technology. 86(5), 296-300 (2019). https://doi.org/10.1364/JOT.86.000296

Abstract:

The phase of an interferogram carries the desired information for various applications such as 3D profilometry that can measure the surface 3D topography of optical elements. The phase can be obtained with a phase shift interferometer by acquiring a series of interferograms while changing optical path difference. The optical path difference is generated through piezoelectric actuator pushing reference mirror. However, the phase achieved by the interferometer has severe error due to the nonlinear characteristic of the piezoelectric actuator. To eliminate the phase error, we propose an open-loop control system to correct the nonlinear characteristic of the piezoelectric actuator. The control system integrates a Micro-programmed Control Unit, a 16-bit Digital-to-Analog Converter, two amplifiers, an inbuilt high-resolution strain gauge sensor, a signal processing unit and a 24-bit Analog-to-Digital Converter with our software to achieve the purpose. The experimental result of the system can accurately linearize the piezoelectric actuator. Both its control principles as well as its experimental validation are depicted in this paper.

Keywords:

interferogram, phase shift, piezoelectric actuator, nonlinear phase error

Acknowledgements:

The research was supported by the National key research and development plan (2016YFF0101903).

OCIS codes: 120.3180, 120.5050, 120.4800

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