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DOI: 10.17586/1023-5086-2021-88-06-84-92
УДК: 681.7.05
Fabrication of high-Q crystalline whispering gallery mode microcavities using single-point diamond turning
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Publication in Journal of Optical Technology
Миньков К.Н, Лихачев Г.В., Павлов Н.Г., Данилин А.Н., Шитиков А.Е., Юрин А.И., Лоншаков Е.А., Булыгин Ф.В., Лобанов В.Е., Биленко И.А. Изготовление высокодобротных кристаллических микрорезонаторов c модами шепчущей галереи с использованием точечного алмазного точения // Оптический журнал. 2021. Т. 88. № 6. С. 84–92. http://doi.org/10.17586/1023-5086-2021-88-06-84-92
Minkov K.N., Likhachev G.V., Pavlov N.G., Danilin A.N., Shitikov A.E., Yurin A.I., Lonshakov E.A., Bulygin F.V., Lobanov V.E., Bilenko I.A. Fabrication of high-Q crystalline whispering gallery mode microcavities using single-point diamond turning [in Russian] // Opticheskii Zhurnal. 2021. V. 88. № 6. P. 84–92. http://doi.org/10.17586/1023-5086-2021-88-06-84-92
K. N. Min’kov, G. V. Likhachev, N. G. Pavlov, A. N. Danilin, A. E. Shitikov, A. I. Yurin, E. A. Lonshakov, F. V. Bulygin, V. E. Lobanov, and I. A. Bilenko, "Fabrication of high-Q crystalline whispering gallery mode microcavities using single-point diamond turning," Journal of Optical Technology. 88(6), 348-353 (2021). https://doi.org/10.1364/JOT.88.000348
A method for the fabrication of high-Q crystalline whispering gallery mode optical microresonators using diamond turning and further asymptotic abrasive polishing is developed and described. The proposed method allows the fabrication of microresonators with a predefined geometry and a Q-factor higher than 107. A step-by-step fabrication procedure is presented, important parameters ensuring the optimal quality of the surface of the fabricated microresonators are determined, the inspection procedure for the principal parameters is described, and a review of the fabrication of microresonators from different materials is presented.
optical microcavities, whispering gallery modes, optical frequency combs, diamond turning, abrasive polishing, quality measurement
Acknowledgements:The research was supported by Russian Science Foundation (20-12-00344).
This study was performed using the equipment of the center for collective usage of the All-Russian Scientific-Research Institute of Optical-Physical Measurements (http://www.ckp.vniiofi.ru/) and the center for collective usage “Advanced Imaging Core Facility” of Skoltech (https://www.skoltech.ru).
OCIS codes: 120.0120, 160.1190, 160.4330
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