Morphology of monocrystalline silicon irradiated by the combination of millisecond-nanosecond lasers with different delays

Guo, M., Zhang, Y., Li, N., Feng, Y., Cai, J., Jin, G.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

M. Guo, Y. X. Zhang, N. Li, Y. S. Feng, J. X. Cai, and G. Y. Jin Morphology of monocrystalline silicon irradiated by the combination of millisecond-nanosecond lasers with different delays (Морфология монокристаллического кремния, облученного комбинацией миллисекундных и наносекундных лазерных импульсов при изменении времени задержки между ними) [на англ. яз.] // Оптический журнал. 2022. Т. 89. № 1. С. 82–91. http://doi.org/10.17586/1023-5086-2022-89-01-82-91

M. Guo, Y. X. Zhang, N. Li, Y. S. Feng, J. X. Cai, and G. Y. Jin Morphology of monocrystalline silicon irradiated by the combination of millisecond-nanosecond lasers with different delays (Морфология монокристаллического кремния, облученного комбинацией миллисекундных и наносекундных лазерных импульсов при изменении времени задержки между ними) [in English] // Opticheskii Zhurnal. 2022. V. 89. № 1. P. 82–91. http://doi.org/10.17586/1023-5086-2022-89-01-82-91

For citation (Journal of Optical Technology):

M. Guo, Y. X. Zhang, N. Li, Y. S. Feng, J. X. Cai, and G. Y. Jin, "Morphology of monocrystalline silicon irradiated by the combination of millisecond-nanosecond lasers with different delays," Journal of Optical Technology. 89(1), 58-65 (2022). https://doi.org/10.1364/JOT.89.000058

Abstract:

Based on the millisecond-nanosecond combined laser mode, the irradiated morphology of monocrystalline silicon is studied experimentally. During the experiment, a high-precision point thermometer is used for monitoring. A shadow method to measure plasma evolution and a metallographic microscope for analysis after the experiment are used. The cleavage and ablation law and the mechanism of monocrystalline silicon are studied under different laser energy densities and delay time conditions. The analysis shows that when the combined laser acts on silicon, the millisecond laser has the effect of preheating. The preheating effect will change the thermal physical properties of monocrystalline silicon, such as the absorption coefficient. Controlling the delay time can improve the energy coupling between the silicon and the nanosecond laser. Changing the delay time also changes the effect of the damage.

Keywords:

combined laser, monocrystalline silicon, temperature, morphology

OCIS codes: 140.3330

References:

1. Li Z., Wang X., Shen Z., et al. Mechanisms for the millisecond laser-induced functional damage to silicon charge-coupled imaging sensors // Appl. Opt. 2015. V. 54. № 3. P. 378–388.
2. Singh A.P., Kapoor A., Tripathi K.N., et al. Laser damage studies of silicon surfaces using ultra-short laser pulses // Optics & Laser Technol. 2002. V. 34. № 1. P. 37–43.
3. Xinyu-Tan, Duanming-Zhang, Boming-Yu, et al. Vaporization effect studying on high-power nanosecond pulsed laser deposition // Physica B. Condensed Matter. 2005. V. 358. № 1–4. P. 86–92.
4. Wang Y., Chen A., Wang Q., et al. Study of signal enhancement in collinear femtosecond-nanosecond doublepulse laser-induced breakdown spectroscopy // Optics & Laser Technol. 2020. № 122. P. 105887.
5. Kupfer R., Quevedo H.J., Smith H.L., et al. Plasma emission characteristics in laser-induced breakdown spectroscopy of silicon with mid-infrared, multi-millijoule, nanosecond laser pulses from a Ho:YLF excitation source // Appl. Opt. 2019. V. 58. № 17. P. 4592–4598.
6. Mahdieh M.H., Momeni A. From single pulse to double pulse ns laser ablation of silicon in water: Photoluminescence enhancement of silicon nanocrystals // Laser Phys. 2014. V. 25. № 1. P. 015901.
7. Momeni A., Mahdieh M.H. Double-pulse nanosecond laser ablation of silicon in water // Laser Phys. Lett. 2015. V. 12. № 7. P. 076102.
8. Zhang X., Lu J., Zhang H.C., et al. Laser-induced periodic surface structure in silicon wafer irradiated by continuous laser // Proc. SPIE. 2019. № 11046. P. 1104635.
9. Lehane C., Kwok H.S. Enhanced drilling using a dual-pulse Nd:YAG laser // Appl. Phys. A. 2001. V. 73. № 1. P. 45–48.
10. Jafarabadi M.A., Mahdieh M.H. Investigation of phase explosion in aluminum induced by nanosecond double pulse technique // Appl. Surface Sci. 2015. № 346. P. 263–269.
11. Lv X., Pan Y., Jia Z., et al. Surface damage induced by a combined millisecond and nanosecond laser // Appl. Opt. 2017. V. 56. № 17. P. 5060–5067.
12. Lv X., Pan Y., Jia Z., et al. Laser-induced damage threshold of silicon under combined millisecond and nanosecond laser irradiation // Appl. Phys. 2017. V. 121. № 11. P. 113102.