Selection of regimes for one-step high-throughput laser printing of silver conducting lines on silicon by forward laser transfer

Nastulyavichus, A.A., Kudryashov, S.I., Smirnov, N.A., Pakholchuk, P.P., Shelygina, S.N., Ulturgasheva, E.V., Saraeva, I.N., Zayarniy, D.A., Pryakhina, V.I., Khmelenin, D.N., Emeliyanova, O.V., Minh, Pham Hong, Duong, Pham Van

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Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Настулявичус А.А., Кудряшов С.И., Смирнов Н.А., Пахольчук П.П., Шелыгина С.Н., Ултургашева Е.В., Сараева И.Н., Заярный Д.А., Пряхина В.И., Хмеленин Д.Н., Емельянова О.В., Фам Хонг Мин, Фам Ван Донг. Выбор режимов одностадийной высокопроизводительной печати серебряных проводящих дорожек на поверхности кремния методом лазерного переноса // Оптический журнал. 2024. Т. 91. № 2. С. 99–111. http://doi.org/10.17586/1023-5086-2024-91-02-99-111

Nastulyavichus A.А., Kudryashov S.I., Smirnov N.А., Paholchuk P.P., Shelygina S.N., Ulturgasheva E.V., Saraeva I.N., Zayarnyi D.A., Pryakhina V.I., Khmelenin D.N, Emelyanova O.V., Pham Hong Minh, Pham Van Duong. Selection of regimes for one-step high-throughput laser printing of silver conducting lines on silicon by forward laser transfer [In Russian] // Opticheskii Zhurnal. 2024. V. 91. № 2. P. 99–111. http://doi.org/10.17586/1023-5086-2024-91-02-99-111

For citation (Journal of Optical Technology):

Alena A. Nastulyavichus, Sergey I. Kudryashov, Nikita A. Smirnov, Petr P. Paholchuk, Svetlana N. Shelygina, Evgenia V. Ulturgasheva, Irina N. Saraeva, Dmitry A. Zayarnyi, Victoria I. Pryakhina, Dmitry N. Khmelenin, Olga V. Emelyanova, Pham Hong Minh, and Pham Van Duong, "Selection of regimes for one-step high-throughput laser printing of silver conducting lines on silicon using forward laser transfer," Journal of Optical Technology. 91(2), 118-124 (2024). https://doi.org/10.1364/JOT.91.000118

Abstract:

The subject of study is conducting tracks on the surface of monocrystalline silicon. The aim of the work is the development of an effective one-stage method for forming conductive elements of electrical circuits on silicon. Method. The deposition of a conductive silver layer is carried out using the method of laser-induced direct transfer from a donor substrate. The selection of laser radiation parameters made it possible to determine the optimal transfer mode to achieve the maximum value of the conductive layer conductivity. The surface topography and chemical composition were studied using scanning and transmission electron microscopy, energy-dispersive X-ray and photoelectron spectroscopy. Main results. The maximum specific conductivity (approximately 54 kS/cm) was obtained when transferring a silver film by laser radiation with a wavelength of 1064 nm, a pulse duration of 120 ns and a power density of 0.21 GW/cm². The scanning speed in this case was 2000 mm/s, which ensured the arrival of approximately 2 laser pulses at each point of the film, resulting in the transfer of the film material particles to the silicon substrate and their subsequent sintering. Practical significance. The method presented in the work can be used to form the conductive elements of the electrical circuits with high specific conductivity in one stage while simultaneously simplifying the technological process of their formation and reducing its duration.

Keywords:

high-performance laser printing, laser-induced forward transfer, silver films, nanoparticles

Acknowledgements:

the study was supported by the Ministry of Science and Higher Education of the Russian Federation (agreement no. 075-15-2023-603). The equipment of the Ural Center for Shared Use “Modern Nanotechnology” of Ural Federal University (Reg. no. 2968), which is supported by the Ministry of Science and Higher Education RF, and of the Center for Collective Use "Structural Diagnostics of Materials" of the Federal Scientific Research Center “Crystallography and Photonics” of the Russian Academy of Sciences was used

OCIS codes: 140.0140, 240.0310

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