Experimental study of the error of a matrix displacement meter

Korolev A.N., Lukin, A.Y., Filatov, Y.V.

For Russian citation (Opticheskii Zhurnal):

Королев А.Н., Лукин А.Я., Филатов Ю.В. Экспериментальное исследование погрешности матричного измерителя перемещений // Оптический журнал. 2025. Т. 92. № 4. С. 42–49. http://doi.org/10.17586/1023-5086-2025-92-04-42-49

Korolev A.N., Lukin A.Ya., Filatov Yu.V. Experimental study of the error of a matrix displacement meter [in Russian] // Opticheskii Zhurnal. 2025. V. 92. № 4. P. 42–49. http://doi.org/10.17586/1023-5086-2025-92-04-42-49

For citation (Journal of Optical Technology):

Abstract:

Subject of study. This paper presents the results of a study of linear-angular measurement technology based on the use of a multi-element 2D mark and a video camera. Aim of study. The objective of the research was to experimentally confirm the predicted random error of matrix displacement meters at the level of units of nanometers. Method. Measurements of linear displacements were carried out by cross-calibration on a two-channel stand with two identical matrix displacement meters with a common linear translator. 1.3 Megapixel CMOS digital cameras were used as an image analyzer. Main results. The difference in the measurement results in both channels made it possible to determine the total random error of the meters. At this stage, it is concluded that the random error of the studied matrix meters does not exceed 2 nm. This result was obtained for the first time with a displacement range of 4 mm. Practical significance. It is shown that when implementing the procedures of matrix measurement technology, it is possible to obtain a random measurement error of several nanometers.

Keywords:

matrix measurement technology, matrix meter, measuring mark, video camera

Acknowledgements:

the authors are grateful for the financial support within the framework of the RSF grant № 20-19-00412

OCIS codes: 120.0120, 230.0230

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