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ISSN: 1023-5086

ru/

ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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УДК: 621.535.683

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For Russian citation (Opticheskii Zhurnal):

Карасев Н.Н., Путилин Э.С. Использование особенностей спектральных характеристик при контроле толщин слоев в процессе осаждения многослойных систем // Оптический журнал. 2004. Т.71. №10 С. 74-78.

 

Karasev N.N., Putilin É.S. Using features of the spectral responses when monitoring the thicknesses of layers during the deposition of multilayer systems [in Russian] // Opticheskii Zhurnal. 2004. V. 71. No 10. P. 74-78.

For citation (Journal of Optical Technology):

Karasev N.N., Putilin É.S. Using features of the spectral responses when monitoring the thicknesses of layers during the deposition of multilayer systems // Journal of Optical Technology. 2004. V. 71. № 10. P. 709-712. https://doi.org/10.1364/JOT.71.000709

Abstract:
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OCIS codes: 240.0310, 310.1620, 310.6860.