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Full text «Opticheskii Zhurnal»
Publication in Journal of Optical Technology
Карасев Н.Н., Путилин Э.С. Использование особенностей спектральных характеристик при контроле толщин слоев в процессе осаждения многослойных систем // Оптический журнал. 2004. Т.71. №10 С. 74-78.
Karasev N.N., Putilin É.S. Using features of the spectral responses when monitoring the thicknesses of layers during the deposition of multilayer systems [in Russian] // Opticheskii Zhurnal. 2004. V. 71. No 10. P. 74-78.
Karasev N.N., Putilin É.S. Using features of the spectral responses when monitoring the thicknesses of layers during the deposition of multilayer systems // Journal of Optical Technology. 2004. V. 71. № 10. P. 709-712. https://doi.org/10.1364/JOT.71.000709
OCIS codes: 240.0310, 310.1620, 310.6860.