УДК: 681.723.26

Metrologic platform with a modulation interference microscope

Loparev ,.V., Pravdivtsev, A.V., Ignat’ev P.S., Indukaev K.V., Osipov P.A., Romash E.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Лопарев А.В., Правдивцев А.В., Игнатьев П.С., Индукаев К.В., Осипов П.А., Ромаш Е.В. Метрологическая платформа с модуляционным интерференционным микроскопом // Оптический журнал. 2012. Т. 79. № 6. С. 72–78.

Loparev A.V., Pravdivtsev A. V., Ignat’ev P.S., Indukaev K.V., Osipov P.A., Romash E.V. Metrologic platform with a modulation interference microscope [in Russian] // Opticheskii Zhurnal. 2012. V. 79. № 6. P. 72–78.

For citation (Journal of Optical Technology):

A. V. Loparev, E. V. Romash, A. V. Pravdivtsev, P. S. Ignat’ev, K. V. Indukaev, and P. A. Osipov, "Metrologic platform with a modulation interference microscope," Journal of Optical Technology. 79(6), 371-375 (2012). https://doi.org/10.1364/JOT.79.000371

Abstract:

Приведены результаты разработки уникальной метрологической платформы, предназначенной для исследования нанодефектов объекта и измерения плоскостности его поверхности на больших площадях. Конструкция платформы основана на согласованном применении метода модуляционной интерференционной микроскопии и бесконтактных аэромагнитных направляющих. Рассмотрены оптическая схема и алгоритм получения панорамных изображений. Показаны перспективы применения метрологической платформы в оптической и полупроводниковой промышленности.

Keywords:

modulation interference microscopy, super resolution, integrated circuit topology, quality control

OCIS codes: 180.3170, 170.1650

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