УДК: 617.7 535.34

Phase-shifting interferometer for monitoring flat and spherical optical components

Vishnyakov, G.N., Levin, G.G., Minaev, V.L., Tselmina, I.Y.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Вишняков Г.Н., Левин Г.Г., Минаев В.Л., Цельмина И.Ю. Интерферометр фазового сдвига для контроля плоских и сферических оптических деталей // Оптический журнал. 2013. Т. 80. № 5. С. 76–82.

Vishnyakov G.N., Levin G.G., Minaev V.L., Tselmina I.Yu. Phase-shifting interferometer for monitoring flat and spherical optical components [in Russian] // Opticheskii Zhurnal. 2013. V. 80. № 5. P. 76–82.

For citation (Journal of Optical Technology):

G. N. Vishnyakov, G. G. Levin, V. L. Minaev, and I. Y. Tselmina, "Phase-shifting interferometer for monitoring flat and spherical optical components," Journal of Optical Technology. 80(5), 316-320 (2013). https://doi.org/10.1364/JOT.80.000316

Abstract:

This paper discusses an automatic interferometer that makes it possible to measure the surface profile of flat and spherical (with a large radius of curvature) optical items. The interferometer’s field of view is as much as 30 mm in diameter. The vertical configuration of the main optical elements of the interferometer allowed it to be made compact and insensitive to vibrations. The surface profile is automatically measured by means of a nine-step phase-shift method. The results of experimental testing of the interferometer and its technical characteristics are presented.

Keywords:

phase-shift interferometry, surface profile, curvature radius, decentering

Acknowledgements:

This work was carried out with the financial support of the Ministry of Education and Science of the Russian Federation under State Contract No. 16.552.11.7056 on July 11, 2012.

OCIS codes: 120.3180

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