УДК: 535.211, 535.214

How the composition of the environment affects the surface erosion of a photodiode when it is irradiated by a laser pulse

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кочкарев Д.В. Влияние состава окружающей среды на эрозию поверхности фотодиода при лазерном импульсном облучении // Оптический журнал. 2015. Т. 82. № 3. С. 65–67.

Kochkarev D.V. How the composition of the environment affects the surface erosion of a photodiode when it is irradiated by a laser pulse [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 3. P. 65–67.

For citation (Journal of Optical Technology):

D. V. Kochkarev, "How the composition of the environment affects the surface erosion of a photodiode when it is irradiated by a laser pulse," Journal of Optical Technology. 82(3), 178-180 (2015). https://doi.org/10.1364/JOT.82.000178

Abstract:

This paper shows the conditions for the appearance and the character of the erosional microstructures on the surface of silicon photodiodes and single-crystal silicon that appear after the silicon is acted on by single and multiple pulses of laser radiation in an atmosphere of pure air and of air contaminated with the vapors of an organometallic compound.

Keywords:

laser glare, photodiodes, radiation erosion, silicon wafer, nanosecond pulses, environment, surface

Acknowledgements:

This research was carried out with the financial support of the Ministry of Education and Science of the Russian Federation as part of State Contract No. 16.740.11.0584 on May 30, 2011.

OCIS codes: 140.3440, 140.6810, 350.1820, 040.5160

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