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Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser
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Publication in Journal of Optical Technology
D. Q. Yuan, M. Zhou, Q. R Wu, J. T. Xu, H. F. Yang Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser [на англ. яз.] // Оптический журнал. 2015. Т. 82. № 6. С. 31–35.
D. Q. Yuan, M. Zhou, Q. R Wu, J. T. Xu, H. F. Yang Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser [in English] // Opticheskii Zhurnal. 2015. V. 82. № 6. P. 31–35.
D. Q. Yuan, Q. R. Wu, J. T. Xu, M. Zhou, and H. F. Yang, "Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser," Journal of Optical Technology. 82(6), 353-356 (2015). https://doi.org/10.1364/JOT.82.000353
A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining with a tightly focused beam of a femtosecond laser with a wavelength of 800 nm, a repetition rate of 1 kHz, and a pulse length of 130 fs in air. We used laser direct writing technology to form periodic double-row nanohole structures, and the laser was focused with a 10× focusing objective lens (NA=0.3). We investigated the relationship between the width of structures and the speed of processing to provide knowledge of the evolution of the nanohole and nanoridge structures.
femtosecond laser; nano-hole arrays; ripples; direct writing
Acknowledgements:The authors would like to acknowledge the National Natural Science Foundation of China (Grant No. 51405181), Natural Science Foundation for Youths of Jiangsu province (No. BK20130407), Colleges and universities Natural Science Fundation of Jiangsu Province (Grant No. 13KJB460001), Tribology Science Fund of State Key Laboratory of Tribology (SKLTKF10B06) for financial support of this work.
OCIS codes: 220.4610, 140.3290
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