УДК: 53.087.92, 681.7.064.64

Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities

Kiriyanov, A.V., Kiriyanov, V.P., Volokhov, I.V., Bobkov, A.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кирьянов А.В., Кирьянов В.П., Волохов И.В., Бобков А.В. Использование метода кругового сканирования для формирования и контроля топологии прецизионных фотошаблонов интегральных датчиков физических величин // Оптический журнал. 2016. Т. 83. № 7. С. 26–31.

Kiriyanov A.V., Kiriyanov V.P., Volokhov I.V., Bobkov A.V. Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 7. P. 26–31.

For citation (Journal of Optical Technology):

A. V. Kir’yanov, V. P. Kir’yanov, I. V. Volokhov, and A. V. Bobkov, "Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities," Journal of Optical Technology. 83(7), 410-414 (2016). https://doi.org/10.1364/JOT.83.000410

Abstract:

This paper analyzes the results of forming and monitoring the topology of photomasks for integrated pressure and turning-angle sensors obtained by means of processing and measurement equipment that operates in polar and Cartesian coordinate systems. It is shown that it is advisable to employ equipment that uses a circular-scanning method to enhance the accuracy with which the given items are fabricated and monitored.

Keywords:

laser image generator, circular-scanning method, photomask, integrated sensor

Acknowledgements:

The authors express gratitude to staff members O. B. Yakovlev and D. Yu. Kruchinin of the Ural Optomechanical Factory (Ekaterinburg) for help in making measurements on the AS-700.
This study was carried out with the support of the Russian Foundation for Basic Research (RFFI Grant No. 13-07-00081).

OCIS codes: 230.4000, 230.0250, 230.0040, 120.5475

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