УДК: 539.234

Optical and performance properties of fluoride and oxide films produced by vacuum evaporation

Kirilenko, V.V., Zhigarnovskiy, B.M., Malkerova, I.P., Samokhov, V.A., Beirakhov, A.G., Mikhailov, A.V., Baranov, A.N.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Кириленко В.В., Жигарновский Б.М., Малкерова И.П., Самохов В.А., Бейрахов А.Г., Михайлов А.В., Баранов А.Н. Оптические и эксплуатационные характеристики пленок фторидов и оксидов, полученных испарением в вакууме // Оптический журнал. 2016. Т. 83. № 9. С. 72–77.

Kirilenko V.V., Zhigarnovskiy B.M., Malkerova I.P., Samokhov V.A., Beirakhov A.G., Mikhailov A.V., Baranov A.N. Optical and performance properties of fluoride and oxide films produced by vacuum evaporation [in Russian] // Opticheskii Zhurnal. 2016. V. 83. № 9. P. 72–77.

For citation (Journal of Optical Technology):

V. V. Kirilenko, B. M. Zhigarnovskiĭ, I. P. Malkerova, V. A. Samokhov, A. G. Beĭrakhov, A. V. Mikhaĭlov, and A. N. Baranov, "Optical and performance properties of fluoride and oxide films produced by vacuum evaporation," Journal of Optical Technology. 83(9), 565-568 (2016). https://doi.org/10.1364/JOT.83.000565

Abstract:

We discuss a range of issues related to optimization of industrial production processes used for deposition of metal fluoride and metal oxide films on optical components. We determine the optical and performance properties of films produced for commercially manufactured equipment via high-vacuum evaporation. We find that substrate temperature, vacuum chamber residual pressure, vacuum chamber working pressure, and ion source operating mode have an effect on these characteristics.

Keywords:

optical coatings, optical properties, performance properties

Acknowledgements:

Ministry of Education and Science of the Russian Federation (Minobrnauka) (14.579.21.0015).

OCIS codes: 160.4760; 310.1860

References:

1. H. K. Pulker, “Characterization of optical thin films,” Appl. Opt. 18(19), 1969–1977 (1979).
2. E. Ritter, “Properties of optical film materials,” Appl. Opt. 20(13), 21–25 (1981).
3. E. N. Kotlikov, V. A. Ivanov, V. T. Pogareva, and E. V. Khonineva, “Study of optical constants of PbTe and GeTe films,” Opt. Spectrosc. 88, 718–720 (2000) [Opt. Spektrosk. 88(5), 795–797 (2000)].
4. A. G. Gusev, A. G. Afanas’eva, R. M. Validov, and E. A. Nesmelov, “Optophysical properties of bismuth fluoride films,” Sov. J. Opt. Technol. 57(5), 314–315 (1990) [Opt. Mekh. Pr. 88(5), 55–57 (1990)].
5. T. N. Krylova, Interference Coatings (Mashinostroenie, Leningrad, 1973).
6. O. S. Heavens, “Measurement of optical constants of thin films,” in Thin Film Physics, G. Hass and R. E. Thun, eds. (Academic Press, New York, London, 1964; Mir, Moscow, 1967), Vol. 2, pp. 193–238.
7. I. S. Gaı˘nutdinov, E. A. Nesmelov, A. V. Mikhaı˘lov, V. P. Ivanov, and G. I. Abzalova, Properties and Production Methods for Interference Coatings Used in Optical Instrumentation (Fén, Kazan’, 2003).
8. R. S. Sokolova, “The absorption of ultraviolet radiation in thin layers of thorium, hafnium, and zirconium oxides,” Sov. J. Opt. Technol. 41(10), 454–456 (1974) [Opt. Mekh. Pr. (10), 20–24 (1974)].
9. V. T. Miller and A. F. Perveev, “Device for ion-cleaning substrates and ion-polishing layers,” J. Opt. Technol. 60(2), 143–145 (1993) [Opt. Zh. 60(2), 72–75 (1993)].
10. L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam-assisted deposition,” J. Vac. Sci. Technol. A 20(1), 102–106 (2002).
11. E. Ritter, “Optical film materials and their applications,” Appl. Opt. 15(10), 2318–2327 (1976).
12. OST 3-1901-95, “Coatings for optical components. Types, basic parameters, and inspection methods,” All-Russian Scientific Research Institute for Mineral Raw Materials, Moscow, 1995.