УДК: 535.016, 535.15, 535.041.08

Study of optical and piezoelectric properties of thin-film Si-SiO2-ZnO structure via pulsed-laser optoacoustic spectroscopy

Grigoriev, L.V., Mazurov, M.A., Shakin, O.V., Nefedov, V.G., Mikhailov, A.V.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Григорьев Л.В., Мазуров М.А., Шакин О.В., Нефедов В.Г., Михайлов А.В. Исследование оптических и пьезоэлектрических свойств тонкоплёночной структуры Si-SiO2-ZnO методом импульсной лазерной оптоакустической спектроскопии // Оптический журнал. 2017. Т. 84. № 2. С. 90–94.

Grigoriev L.V., Mazurov M.A., Shakin O.V., Nefedov V.G., Mikhaylov A.V. Study of optical and piezoelectric properties of thin-film Si-SiO2-ZnO structure via pulsed-laser optoacoustic spectroscopy [in Russian] // Opticheskii Zhurnal. 2017. V. 84. № 2. P. 90–94.

For citation (Journal of Optical Technology):

L. V. Grigor’ev, M. A. Mazurov, O. V. Shakin, V. G. Nefedov, and A. V. Mikhaĭlov, "Study of optical and piezoelectric properties of thin-film Si-SiO₂-ZnO structure via pulsed-laser optoacoustic spectroscopy," Journal of Optical Technology. 84(2), 137-139 (2017). https://doi.org/10.1364/JOT.84.000137

Abstract:

The results of an investigation of the optical and piezoelectric properties of a Si-SiO₂-ZnO microstructure via pulsed-laser optoacoustic spectroscopy are presented. Using optoacoustic probing, the speed of an acoustic wave propagating in the zinc oxide layer was calculated to be 3.01×10³ m/s, and the acoustic wave absorption coefficient was determined to be 3.45 dB/cm. The acousto-optic constant M₂ for the ZnO film was determined to be 8.78×10⁻¹⁸ s³/g using the modified Dixon method.

Keywords:

zinc oxide, optoacoustic probing, pulsed-laser optoacoustic spectroscopy

Acknowledgements:

The research was supported by the Russian Foundation for Basic Research (RFBR) (16-07-00237).

OCIS codes: 250.0250, 300.0300, 310.0310, 160.0160

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