Effect of composition nonstoichiometry on the optical properties of titanium dioxide films

Novopashin, V.V., Skvortsov, L.A., Skvortsova, M.I.

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For Russian citation (Opticheskii Zhurnal):

Новопашин В.В., Скворцов Л.А., Скворцова М.И. Влияние нестехиометрии состава на оптические свойства плёнок диоксида титана // Оптический журнал. 2018. Т. 85. № 12. С. 77–82. http://doi.org/10.17586/1023-5086-2018-85-12-77-82

Novopashin V.V., Skvortsov L.A., Skvortsova M.I. Effect of composition nonstoichiometry on the optical properties of titanium dioxide films [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 12. P. 77–82. http://doi.org/10.17586/1023-5086-2018-85-12-77-82

For citation (Journal of Optical Technology):

V. V. Novopashin, L. A. Skvortsov, and M. I. Skvortsova, "Effect of composition nonstoichiometry on the optical properties of titanium dioxide films," Journal of Optical Technology. 85(12), 803-807 (2018). https://doi.org/10.1364/JOT.85.000803

Abstract:

It is established that the mechanisms of light absorption in titanium dioxide films differ in the visible and near-infrared spectral ranges. In the near-infrared range of the spectrum, the contribution to the absorption coefficient made by the intrinsic defects associated with the nonstoichiometry of the film composition is dominant. At the same time, in the visible spectral range, the main contribution to absorption is most likely made by external defects, namely, foreign inclusions and impurities contained in the starting material for film deposition. It is shown that the introduction of monitoring of the photothermal signal from the pellets of the raw material makes it possible to minimize and stabilize the absorption in the visible region of the spectrum.

Keywords:

titanium dioxide, reactive thermal evaporation, absorption, composition stoichiometry, photothermal radiometry

OCIS codes: 140.0140; 310.1860

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