Precision method of monitoring the parameters of the local nanometer-level deviations of an optical component’s surface

Baryshnikov, N.V., Denisov, D.G., Karasik, V.E., Abdulkadyrov, M.A., Ignatov, A.N., Patrikeev, V.E., Semenov, A.P., Morozov, A.B., Sudarikov, I.N., Sharov, Y.A.

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For Russian citation (Opticheskii Zhurnal):

Барышников Н.В., Денисов Д.Г., Карасик В.Е., Абдулкадыров М.А., Игнатов А.Н., Патрикеев В.Е., Семенов А.П., Морозов А.Б., Судариков И.Н., Шаров Ю.А. Высокоточный метод контроля параметров локальных отклонений нанометрового уровня поверхности оптической детали // Оптический журнал. 2018. Т. 85. № 3. С. 54–61. http://doi.org/10.17586/1023-5086-2018-85-03-54-61

Baryshnikov N.V., Denisov D.G., Karasik V.E., Abdulkadyrov M.A., Ignatov A.N., Patrikeev V.E., Semenov A.P., Morozov A.B., Sudarikov I.N., Sharov Yu.A. Precision method of monitoring the parameters of the local nanometer-level deviations of an optical component’s surface [in Russian] // Opticheskii Zhurnal. 2018. V. 85. № 3. P. 54–61. http://doi.org/10.17586/1023-5086-2018-85-03-54-61

For citation (Journal of Optical Technology):

N. V. Baryshnikov, D. G. Denisov, V. E. Karasik, M. A. Abdulkadyrov, A. N. Ignatov, V. E. Patrikeev, A. P. Semenov, A. B. Morozov, I. N. Sudarikov, and Yu. A. Sharov, "Precision method of monitoring the parameters of the local nanometer-level deviations of an optical component’s surface," Journal of Optical Technology. 85(3), 166-172 (2018). https://doi.org/10.1364/JOT.85.000166

Abstract:

A method of monitoring local nanometer-level deviations of the surfaces of large optical components (elements) from a given profile has been developed, scientifically validated, and experimentally confirmed. The method is based on an algorithm for calculating the objective function—the spectral density of a one-dimensional correlation function in a wide spectral range of spatial frequencies. Theoretical and experimental studies have been made of the nonexcluded systematic and random error components of determining the optimization parameter of the objective function being used—the rms deviation of the local deviations of the surfaces of large optical components from a given profile.

Keywords:

optical monitoring, wave front characteristics, surface profile characteristics, spectral density of correlation function, dynamic interferometry, random error analysis, effect of spectral leakage

OCIS codes: 220.0220, 220.0230, 220.4610, 350.1260

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