Hartmannometer and Fizeau interferometer: Comparative analysis of the devices for optical surface test

Galaktionov I.V., Nikitin A.N., Sheldakova, Y.V., Toporovskiy, V.V., Abdulrazak S.H., Kudryashov, A.V.

For Russian citation (Opticheskii Zhurnal):

Галактионов И.В., Никитин А.Н., Шелдакова Ю.В., Топоровский В.В., Абдулразак С.Х., Кудряшов А.В. Гартманометр и интерферометр Физо: сравнительный анализ устройств в задачах контроля качества оптических поверхностей // Оптический журнал. 2024. Т. 91. № 11. С. 43–53. http://doi.org/10.17586/1023-5086-2024-91-11-43-53

Galaktionov I.V., Nikitin A.N., Sheldakova J.V., Toporovsky V.V., Abdulrazak S.Kh., Kudryashov A.V. Hartmannometer and Fizeau interferometer: Comparative analysis of the devices for optical surface test [in Russian] // Opticheskii Zhurnal. 2024. V. 91. № 11. P. 43–53. http://doi. org/10.17586/1023-5086-2024-91-11-43-53

For citation (Journal of Optical Technology):

Abstract:

Subject of study. Opto-mechanical device as an alternative to the Fizeau interferometer for optical quality test. Aim of study. Development and research of the metrological device for measurement of the optical surface flatness. Comparison of the results to ones obtained by the Fizeau interferometer. Method. Measurements of wavefront of a radiation reflected from the optical surface under test by means of Shack–Hartmann wavefront sensor. Main results. As a result of the research, a new optical metrological device called a Hartmanometer was developed. A method for its calibration is presented, and a comparison of the results of measuring a test optical surface using the developed device and a classic Fizeau interferometer is given. The total amplitude of wave front distortions measured using a Fizeau interferometer was 0.127 μm (standard deviation 0.022 μm), using a hartmanometer — 0.131 μm (standard deviation 0.024 μm). Practical significance. The newly developed device can serve as a robust alternative to the conventional Fizeau interferometer in the tasks of optical surface testing.

Keywords:

Hartmannometer, Fizeau interferometer, Shack–Hartmann wavefront sensor, wavefront sensing, interferometry

OCIS codes: 120.2650, 120.3930, 120.5050

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