Effect of thermal treatment on optoelectronic characteristics of indium tin oxide coatings

Parshin B.A., Butina M.V., Makeev M.O., Voronin A.S., Buryanskaya E.L., Fadeev Y.V., Moiseev K.М., Hydyrova S.Y., Mikhalev P.А.

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For Russian citation (Opticheskii Zhurnal):

Паршин Б.А., Бутина М.В., Макеев М.О., Воронин А.С., Бурьянская Е.Л., Фадеев Ю.В., Моисеев К.М., Хыдырова С.Ю., Михалев П.А. Влияние термообработки на оптоэлектронные характеристики покрытий из оксида индия-олова // Оптический журнал. 2025. Т. 92. № 9. С. 82–91. http://doi.org/10.17586/1023-5086-2025-92-09-82-91

Parshin B.A., Butina M.V., Makeev M.O., Voronin A.S., Buryanskaya E.L., Fadeev Y.V., Moiseev K.M., Hydyrova S.Y., Mikhalev P.A. Effect of thermal treatment on opto-electronic characteristics of indium tin oxide coatings [in Russian] // Opticheskii Zhurnal. 2025. V. 92. № 9. P. 82–91. http://doi.org/10.17586/1023-5086-2025-92-09-82-91

For citation (Journal of Optical Technology):

Abstract:

Subject of study. The effect of annealing in a nitrogen atmosphere on the optoelectronic pro-perties and surface morphology of indium tin oxide thin films. Aim of study. Optimization of prepa-ration conditions for indium tin oxide thin films with tailored optoelectronic and morphological characteristics through variation of film thickness and annealing at 200 °C in a nitrogen atmosphere. Method. The optical properties of the films, including transparency and haze, were investigated using spectrophotometry. Electrical characteristics were measured using the four-probe method, specifically for determining surface resistance. Atomic force microscopy was employed to study the surface morphology, enabling the measurement of surface roughness and the determination of grain sizes via autocorrelation analysis. Main results. Annealing in a nitrogen atmosphere enhanced the optoelectronic properties of indium tin oxide films: transparency increased, and surface resistance decreased, as confirmed by the calculated Figure of Merit. Morphological studies revealed a reduction in grain size and an increase in their quantity with increasing film thickness, driven by the activation of diffusion and nucleation processes. Practical significance. The obtained results confirm the effectiveness of annealing in a nitrogen atmosphere as a method for enhancing the properties of indium tin oxide coatings. This creates new possibilities for their use in optoelectronic devices that require high transparency, low resistance, and structural stability.

Keywords:

indium tin oxide coatings, light transmittance, haze, surface resistance, thermal treatment

Acknowledgements:

the work was carried out within the framework of the state assignment of the Ministry of Science and Higher Education of the Russian Federation (topic № FSFN-2024-0066).

OCIS codes: 160.2100, 310.6860, 310.6870

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