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Photolithography in the production of circular optical scales at the Ural Optomechanical Factory
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Publication in Journal of Optical Technology
Кручинин Д.Ю. Фотолитография в производстве круговых оптических шкал на Уральском оптико-механическом заводе // Оптический журнал. 2008. Т. 75. № 4. С. 92–94.
Kruchinin D.Yu. Photolithography in the production of circular optical scales at the Ural Optomechanical Factory [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 4. P. 92–94.
D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Journal of Optical Technology. 75 (4), 282-284 (2008). https://doi.org/10.1364/JOT.75.000282
This paper discusses questions of the modernization of the production of circular optical scales. The results of modernizing the production and of introducing the technology of reverse photolithography for fabricating geodesic dials, rasters, and code disks are presented.
OCIS codes: 110.5220
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