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ISSN: 1023-5086

ru/

ISSN: 1023-5086

Scientific and technical

Opticheskii Zhurnal

A full-text English translation of the journal is published by Optica Publishing Group under the title “Journal of Optical Technology”

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УДК: 53.087.92, 681.7.064

Photolithography in the production of circular optical scales at the Ural Optomechanical Factory

For Russian citation (Opticheskii Zhurnal):

Кручинин Д.Ю. Фотолитография в производстве круговых оптических шкал на Уральском оптико-механическом заводе // Оптический журнал. 2008. Т. 75. № 4. С. 92–94.

 

Kruchinin D.Yu. Photolithography in the production of circular optical scales at the Ural Optomechanical Factory [in Russian] // Opticheskii Zhurnal. 2008. V. 75. № 4. P. 92–94.

For citation (Journal of Optical Technology):

D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Journal of Optical Technology. 75 (4), 282-284 (2008). https://doi.org/10.1364/JOT.75.000282

Abstract:

This paper discusses questions of the modernization of the production of circular optical scales. The results of modernizing the production and of introducing the technology of reverse photolithography for fabricating geodesic dials, rasters, and code disks are presented.

OCIS codes: 110.5220

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