Measuring the parameters of vibrations and surface roughness, using the frequency spectrum of the intensity fluctuations of scattered radiation

Бронников В.И., Калугин М.М. Измерение параметров вибраций и шероховатости поверхности с использованием частотного спектра флуктуаций интенсивности рассеянного излучения // Оптический журнал. 2009. Т. 76. № 11. С. 32–37.

Bronnikov V.I., Kalugin M.M. Measuring the parameters of vibrations and surface roughness, using the frequency spectrum of the intensity fluctuations of scattered radiation [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 11. P. 32–37.

V. N. Bronnikov and M. M. Kalugin, "Measuring the parameters of vibrations and surface roughness, using the frequency spectrum of the intensity fluctuations of scattered radiation," Journal of Optical Technology. 76 (11), 697-701 (2009). https://doi.org/10.1364/JOT.76.000697

This paper uses a diffraction model of radiation scattering on a rough surface to show that it is possible to expand the region of use of the temporal intensity fluctuations of radiation scattered by a vibrating surface (a dynamic speckle pattern). It is established that the characteristics of the temporal frequency spectrum of the intensity inhomogeneities make it possible to measure not only the frequency and amplitude of the vibrations, but also the surface roughness. Experimental results of measurements of the parameters of the vibrations and roughness are presented, using laser radiation with wavelength 0.63μm.