Microbolometer detector arrays for the infrared and terahertz ranges

Демьяненко М.А., Есаев Д.Г., Овсюк В.Н., Фомин Б.И., Асеев А.Л., Князев Б.А., Кулипанов Г.Н., Винокуров Н.А. Матричные микроболометрические приемники для инфракрасного и терагерцового диапазонов // Оптический журнал. 2009. Т. 76. № 12. С. 5–11.

Demianenko M.A., Esaev D.G., Ovsyuk B.N., Fomin B.I., Aseev A.L., Knyazev B.A., Kulipanov G.N., Vinokurov N.A. Microbolometer detector arrays for the infrared and terahertz ranges [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 12. P. 5–11.

M. A. Dem’yanenko, D. G. Esaev, V. N. Ovsyuk, B. I. Fomin, A. L. Aseev, B. A. Knyazev, G. N. Kulipanov, and N. A. Vinokurov, "Microbolometer detector arrays for the infrared and terahertz ranges," Journal of Optical Technology. 76 (12), 739-743 (2009). https://doi.org/10.1364/JOT.76.000739

This paper presents the results of the development of photodetectors for the IR and terahertz ranges, based on uncooled microbolometer detector arrays fabricated by the sol-gel technology. Detectors with a 320×240-element format are demonstrated, having a temperature resolution better than 100mK and a threshold power of 160pW/pixel in the 8-14-μm range, with a response time of 12-16ms. The threshold power at a wavelength of 130μm was 33nW/pixel for a terahertz image visualized in a 160×120 format at a rate of 90frame/sec. A design was developed to match an antenna with an uncooled high-resistance integrated microbolometer, allowing the detector sensitivity to be significantly increased in the terahertz range.