Thickness uniformity of films deposited on rotating substrates

Котликов Е.Н., Иванов В.А., Прокашев В.Н., Тропин А.Н. Равномерность толщины пленок, осажденных на вращающиеся подложки // Оптический журнал. 2009. Т. 76. № 2. С. 58–62.

Kotlikov E.N., Ivanov V.A., Prokashev V.N., Tropin A.N. Thickness uniformity of films deposited on rotating substrates [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 2. P. 58–62.

E. N. Kotlikov, V. N. Prokashev, V. A. Ivanov, and A. N. Tropin, "Thickness uniformity of films deposited on rotating substrates," Journal of Optical Technology. 76 (2), 100-103 (2009). https://doi.org/10.1364/JOT.76.000100

The coating uniformity of optical films on large items (up to 200mm) or on cassettes with a large number of substrates has substantial significance when multilayer optical coatings are commercially fabricated. This article discusses how the thickness distribution of a deposited film over the radius of a large substrate depends on the geometrical parameters of the mechanism of planetary rotation of the substrates. It is shown that, for a certain relationship of these parameters, the nonuniformity over the thickness of the deposited film can be less than 0.05% on the entire surface of the substrate.