Photolithographic technologies in the production of optical scales (grids)

Кручинин Д.Ю. Фотолитографические технологии в производстве оптических шкал (сеток) // Оптический журнал. 2009. Т. 76. № 2. С. 71–73.

Kruchinin D.Yu. Photolithographic technologies in the production of optical scales (grids) [in Russian] // Opticheskii Zhurnal. 2009. V. 76. № 2. P. 71–73.

D. Yu. Kruchinin, "Photolithographic technologies in the production of optical scales (grids)," Journal of Optical Technology. 76 (2), 111-113 (2009). https://doi.org/10.1364/JOT.76.000111

This paper discusses questions of the production of optical scales (grids). The results of introducing photolithographic technologies at a plant for fabricating such grids are presented.