УДК: 535-31
Size characteristics of polymeric microstructures accompanying the UV hardening of a nanocomposite
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Publication in Journal of Optical Technology
Ворзобова Н.Д., Булгакова В.Г., Бурункова Ю.Э. Размерные характеристики полимерных микроструктур при УФ-отверждении нанокомпозита // Оптический журнал. 2010. Т. 77. № 10. С. 72–77.
Vorzobova N.D., Bulgakova V.G., Burunkova Yu.E. Size characteristics of polymeric microstructures accompanying the UV hardening of a nanocomposite [in Russian] // Opticheskii Zhurnal. 2010. V. 77. № 10. P. 72–77.
N. D. Vorzobova, V. G. Bulgakova, and Yu. É. Burunkova, "Size characteristics of polymeric microstructures accompanying the UV hardening of a nanocomposite," Journal of Optical Technology. 77(10), 649-653 (2010). https://doi.org/10.1364/JOT.77.000649
This paper discusses trends in the formation of three-dimensional polymeric microstructures in a UV-hardenable nanocomposite. It is established that the size characteristics of the microstructural elements are connected with the exposure parameters, the characteristics of the amplitude mask, and the layer thickness. Methods of reducing the characteristic sizes of the microstructural elements and of increasing the format ratio are determined.
polymeric microstructure, nanocomposite, photopolymerization, deep lithography, characteristic size, format ratio
Acknowledgements:The research was supported by the Federal special purpose program "Scientific and academic staff of innovative Russia" for 2009-2013, state contract No. П570.
OCIS codes: 160.4670; 160.5470
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