УДК: 535.016, 535.15, 535.041.08

Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method

Grigoriev, L.V., Nefedov, V.G., Shakin, O.V., Mikhailov, A.V., Eliseev, E.N.

Publication in Journal of Optical Technology

For Russian citation (Opticheskii Zhurnal):

Григорьев Л.В., Нефедов В.Г., Шакин О.В., Михайлов А.В., Елисеев Е.Н. Исследование структурных и оптических свойств тонких поликристаллических пленок оксида цинка, полученных ионно-плазменным методом // Оптический журнал. 2015. Т. 82. № 5. С. 66–70.

Grigoriev L.V., Nefedov V.G., Shakin O.V., Mikhailov A.V., Eliseev E.N. Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method [in Russian] // Opticheskii Zhurnal. 2015. V. 82. № 5. P. 66–70.

For citation (Journal of Optical Technology):

L. V. Grigor’ev, V. G. Nefedov, O. V. Shakin, A. V. Mikhaĭlov, and E. N. Eliseev, "Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method," Journal of Optical Technology. 82(5), 315-318 (2015). https://doi.org/10.1364/JOT.82.000315

Abstract:

This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology—ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light–sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.

Keywords:

polycrystalline thin films, zinc oxide, ion-plasma sputtering, optical spectrum, UV photodetectors

Acknowledgements:

This work was carried out with the financial support of the Ministry of Education and Science of the Russian Federation (identifier PNIÉR: RFMEF158114X0006).

OCIS codes: 250.0250, 300.0300, 310.0310, 160.0160

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